Thin film thermocouple for metal cutting temperature measurement and manufacturing method thereof

A metal cutting and thermocouple technology, applied in the manufacture/processing of thermoelectric devices, measuring heat, and using electrical devices, etc., can solve the problem of difficult to meet the real-time acquisition of the transient temperature of the tool surface during cutting, many microscopic defects in the film, and difficult to shoot Problems such as the rake face, to achieve rapid dynamic response, short response time, and firm combination

Inactive Publication Date: 2014-02-05
TSINGHUA UNIV
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the problems of thin-film thermocouples produced by the above two preparation methods are that there are many microscopic defects in the thin film, and the bonding force between the thin film and the substrate or between the thin film and the thin film is not strong enough.
These traditional cutting temperature measurement methods have their own limitations (for example, the natural thermocouple method can only obtain the average temperature of the knife-chip contact surface, a

Method used

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  • Thin film thermocouple for metal cutting temperature measurement and manufacturing method thereof
  • Thin film thermocouple for metal cutting temperature measurement and manufacturing method thereof
  • Thin film thermocouple for metal cutting temperature measurement and manufacturing method thereof

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preparation example Construction

[0028] The preparation method of the thin-film thermocouple for metal cutting temperature measurement provided by the invention comprises the following steps (such as image 3 shown):

[0029] a) Deposit a layer of SiO with a thickness of 450-550nm on the surface of the ceramic turning tool blade 2 , forming a buffer layer 2, the surface roughness is controlled within the range of 25±5nm;

[0030] b) Using two hollow mechanical masks made of high-temperature-resistant molybdenum, the Ni electrode 3 with a thickness of 100-150 nm and the NiCr electrode 4 with the same thickness were prepared on the buffer layer by using an electron beam evaporation coating platform; the Ni electrode and the NiCr electrode Form a temperature measuring hot node 5 at the tip of the knife; and set an electrode terminal board 8 at the ends of the two electrodes;

[0031] c) Put the thin-film thermocouple prepared in step b) into a resistance furnace, and keep it warm for 28-30 minutes at a tempera...

Embodiment

[0035] Embodiment: The specific dimensions of the thin-film thermocouple in this embodiment are shown in Table 1.

[0036] Table 1. Dimensional design of specific examples of thin-film thermocouples

[0037]

[0038] In a specific embodiment of the invention, its processing steps are:

[0039] a) in Al 2 o 3 A layer of SiO is deposited on the surface of ceramic turning tool insert substrate 1 2 Buffer layer 2, with a thickness of 500nm, aims to improve the problem of excessive roughness of the substrate (relative to the thin film coating), and control the surface roughness of the substrate within the range of 25±5nm;

[0040] b) A hollow mechanical mask made of high temperature resistant molybdenum material ( Figure 4 ), it is very stable at high temperature, and hardly diffuses with the thermocouple electrode film, which greatly improves the purity of the electrode. The size of the mask plate is consistent with the base of the turning tool blade, which can achieve a c...

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Abstract

The invention discloses a thin film thermocouple for metal cutting temperature measurement and a manufacturing method thereof, and belongs to the technical field of thin films and machining measurement. According to the thin film thermocouple for metal cutting temperature measurement, a plurality of layers of functional thin films are deposited on a ceramic turning tool blade base through the utilization of a hollow mechanical mask plate and the electron beam evaporation technology. Firstly, a buffering layer is plated on the base in advance for solving the problem that the surface of the ceramic turning tool blade is rough. Then, the Ni electrode and the NiCr electrode of the thin film thermocouple are respectively manufactured on the buffering layer by using the mask plate, and a temperature measuring node is formed at the tip of a turning tool. To protect the thin film thermocouple and enable the thin film thermocouple to play a stable role in metal cutting temperature measurement, and an insulating layer and a hardening protecting layer are respectively deposited on a thermal node area through an electron beam evaporation method. The thin film thermocouple for metal cutting temperature measurement has the advantages of being high in flexibility, high in response speed and the like, can be applied to an industrial production environment, and solves the problem that a traditional method cannot be used for measuring the transient temperature which changes rapidly in metal cutting machining.

Description

technical field [0001] The invention relates to a thin-film thermocouple, in particular to a thin-film thermocouple used for metal cutting temperature measurement, and belongs to the technical field of thin-film and machining measurement. Background technique [0002] With the rapid development of science and technology today, the low-dimensionality of various materials has become one of the important trends in the development of material science. A large number of thin-film materials with different functions have been used more and more in industrial production, and thin-film thermoelectric The coupler is a new type of sensor that has emerged with the development of thin film material technology. Compared with ordinary bulk thermocouples, thin-film thermocouples have typical two-dimensional characteristics, and the size of their temperature measurement nodes is mostly on the order of microns or nanometers. Therefore, it has the advantages of small heat capacity, sensitive ...

Claims

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Application Information

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IPC IPC(8): H01L35/32H01L35/34G01K7/02
Inventor 方刚陈曦
Owner TSINGHUA UNIV
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