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A method and a system for synchronously establishing processing working among devices

An equipment room and operation technology, applied in the directions of comprehensive factory control, comprehensive factory control, electrical program control, etc., can solve the problems of reducing the yield rate and production capacity of inline machines, and the time-consuming and labor-intensive wafer processing.

Active Publication Date: 2014-03-19
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] In view of the above existing problems, the present invention discloses a method and system for creating processing jobs synchronously between devices, so as to overcome the failure to create processing jobs in the latter device due to the sequence of creating processing jobs for the same lot among devices in the prior art When processing the wafer after gluing, it is time-consuming and labor-intensive, and it is easy to exceed the Qtime to generate rework, thereby reducing the yield and production capacity of the inline machine.

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  • A method and a system for synchronously establishing processing working among devices
  • A method and a system for synchronously establishing processing working among devices

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Embodiment Construction

[0029] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

[0030] The first embodiment of the present invention relates to a method for creating and processing jobs synchronously between devices, see figure 1 , the method includes:

[0031] S1. The control device receives the pre-work item information, and lists the pre-work item information in a queue.

[0032] S2. Synchronously create processing jobs for all devices for the top pre-job items in the queue, and send a processing job request to the execution terminal after all devices have successfully created processing jobs.

[0033] S3. After receiving the job processing request, the execution terminal sends a job processing start command to the control device.

[0034] S4. After the control device receives the command to start the processing operation, the control device starts processing the pre-o...

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Abstract

The invention relates to the technical field of semiconductor manufacturing, and specifically discloses a method and a system for synchronously establishing processing working among devices. According to the invention, through the sequencing of goods through queues, so that synchronous establishment of processing working of all the devices in any condition can be ensured, and establishing progresses of the processing working of the devices are maintained to be consistent with each other; after the processing working of all the devices is established successfully, the processing working begins, and wafer scrap or reworking phenomenon due to that the processing working of one device is completed but the processing working of another device fails to be established will not happen, and waiting time will not be easily exceeded, so that the reworking rate is reduced, and the yield rate and the loading and unloading capacity of inline machines are improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a method and a system for synchronously creating processing jobs between devices. Background technique [0002] At present, the semiconductor chip manufacturing process is extremely precise and complicated, and the lithography process is the top priority in the entire production process. The production capacity and speed of the lithography machine determine the process level and shipment speed of the entire FAB (wafer factory). However, lithography machines are extremely expensive, making FAB do everything possible to improve the yield and utilization of the machine. [0003] Since the current inline (inline) machine for the lithography process is composed of a tracker (coating and developing machine) and a scanner (scanning lithography machine) or stepper (stepping lithography machine), the tracker realizes gluing and developing The function of scanner or st...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418
CPCY02P90/02
Inventor 杨习刚
Owner SHANGHAI HUALI MICROELECTRONICS CORP