Masking tool for evaporation of electrodes of micro-mechanical quartz sensor

A micromechanical sensor and mask technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of poor surface electrode shielding protection, unsuitable for mass substrate production, large deformation, etc. , to achieve the effect of facilitating production operation, reducing alignment and fixing, and improving production efficiency

Active Publication Date: 2014-03-26
BEIJING RES INST OF TELEMETRY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The commonly used stainless steel metal mask plate will have a large deformation at this time, which makes the shielding protection of the surface electrode poor and short circuit occurs
Generally, to solve the deformation of the metal mask plate during the evaporation process, complex tooling is used to compress and fix the mask plate, but this kind of tooling is more difficult and not suitable for mass production of substrates

Method used

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  • Masking tool for evaporation of electrodes of micro-mechanical quartz sensor
  • Masking tool for evaporation of electrodes of micro-mechanical quartz sensor
  • Masking tool for evaporation of electrodes of micro-mechanical quartz sensor

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Embodiment Construction

[0019] The present invention will be further introduced below in conjunction with the accompanying drawings.

[0020] As shown in FIG. 1 , the present invention provides a mask tooling 100 for electrode evaporation of quartz micromechanical sensors. The mask tooling 100 includes an upper mask plate 10 , a lower mask plate 30 and a fixing fixture 40 . As shown in Figure 2, the upper mask 10 includes a first frame 1 and a first thin plate 3; the first thin plate 3 is fixed on the lower surface of the first frame 1 by laser welding, and the laser welding points 2 left on the surface not higher than the surface of the first thin plate 3 . A first tapered hole 11 is formed on the first frame 1, and the diameter of the upper end of the first tapered hole is larger than that of the lower end. As shown in Figure 3, the lower mask 30 includes a second frame 5 and a second thin plate 8; the second thin plate 8 is fixed on the upper surface of the second frame 5 by laser welding, and th...

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Abstract

The invention discloses a masking tool for evaporation of electrodes of a micro-mechanical quartz sensor. The masking tool comprises an upper masking plate (10), a lower masking plate (30) and fixing fixtures (40), wherein the upper masking plate (10) comprises a first frame (1) and a first sheet (3); the lower masking plate (30) comprises a second frame (5) and a second sheet (8); the second sheet (8) is fixed on the upper surface of the second frame (5) through laser welding; air suction holes (4) are transversely formed in the second frame (5); air suction grooves (7) are formed in positions, which are close to the outer edge of the second sheet (8), of the second frame (5) circumferentially and communicated with the air suction holes (4); and the upper masking plate (10), a to-be-machined substrate (20) and the lower masking plate (30) are sequentially fixed through the fixing fixtures (40). The masking tool is simple in structure, convenient to machine and capable of well realizing two-sided masking evaporation of the electrodes.

Description

technical field [0001] The invention relates to a mask tooling used for vapor deposition of quartz micromechanical sensor electrodes. Background technique [0002] Micromechanical sensor is a new type of sensor manufactured by microelectronics and micromachining technology. Compared with traditional sensors, it has small size, light weight, low cost, low power consumption, high reliability, and is suitable for mass production. It is easy to integrate and realize the characteristics of intelligence. At the same time, the feature size on the order of micron makes it possible to complete some functions that cannot be realized by traditional mechanical sensors. Quartz crystals are widely used in the preparation of micromechanical sensors due to their advantages such as good insulation, good temperature stability, good mechanical properties, high quality factor, and easy fabrication and processing. Such as quartz micromachined gyroscope, quartz micromachined accelerometer, micr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04
Inventor 陈艳孟丽娜金小锋邹江波闫海郭亚北于慧路文一
Owner BEIJING RES INST OF TELEMETRY
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