Masking tool for evaporation of electrodes of micro-mechanical quartz sensor

A micromechanical sensor and mask technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of poor surface electrode shielding protection, unsuitable for mass substrate production, large deformation, etc. , to achieve the effect of facilitating production operation, reducing alignment and fixing, and improving production efficiency
CN103668054AActive Publication Date: 2014-03-26BEIJING RES INST OF TELEMETRY +1
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
BEIJING RES INST OF TELEMETRY
Publication Date
2014-03-26

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Abstract

The invention discloses a masking tool for evaporation of electrodes of a micro-mechanical quartz sensor. The masking tool comprises an upper masking plate (10), a lower masking plate (30) and fixing fixtures (40), wherein the upper masking plate (10) comprises a first frame (1) and a first sheet (3); the lower masking plate (30) comprises a second frame (5) and a second sheet (8); the second sheet (8) is fixed on the upper surface of the second frame (5) through laser welding; air suction holes (4) are transversely formed in the second frame (5); air suction grooves (7) are formed in positions, which are close to the outer edge of the second sheet (8), of the second frame (5) circumferentially and communicated with the air suction holes (4); and the upper masking plate (10), a to-be-machined substrate (20) and the lower masking plate (30) are sequentially fixed through the fixing fixtures (40). The masking tool is simple in structure, convenient to machine and capable of well realizing two-sided masking evaporation of the electrodes.
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Description

technical field

[0001] The invention relates to a mask tooling used for vapor deposition of quartz micromechanical sensor electrodes. Background technique

[0002] Micromechanical sensor is a new type of sensor manufactured by microelectronics and micromachining technology. Compared with traditional sensors, it has small size, light weight, low cost, low power consumption, high reliability, and is suitable for mass production. It is easy to integrate and realize the characteristics of intelligence. At the same time, the feature size on the order of micron makes it possible to complete some functions that cannot be realized by traditional mechanical sensors. Quartz crystals are widely used in the preparation of micromechanical sensors due to their advantages such as good insulation, good temperature stability, good mechanical properties, high quality factor, and easy fabrication and processing. Such as quartz micromachined gyroscope, quartz micromachined accelerometer, micr...

Claims

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