Three-dimensional glass optical waveguide preparation method

Abstract

The invention discloses a three-dimensional glass optical waveguide preparation method. Firstly, a three-dimensional glass structure of one or more types in the group comprising a ridge type, a groove type and a stepped type is prepared on a sodium calcium glass substrate through wet etching process or dry etching process or laser micro processing technology, and then ion exchange is carried out on the etched glass substrate to obtain a ridge type glass optical waveguide or a side wall type glass optical waveguide or a ridge / side wall coupled type glass optical waveguide. Compared with the commonly used three-dimensional glass optical waveguide preparation method of 'ion exchange firstly and etching secondly', according to the three-dimensional glass optical waveguide preparation method, no difficulty is added to the production process, the ion exchange time can be obviously shortened, thus the surface roughness increase caused by the ion exchange can be suppressed, the side wall refractive index contrast of the prepared three-dimensional glass optical waveguide is large, thus a side wall evanescent field is strong, and the method is suitable for the preparation of a high sensitivity biochemical sensor and a photonic device with a small radius of curvature.

Description

technical field [0001] The invention relates to the field of integrated optical waveguide preparation technology and integrated optical waveguide devices, in particular to a preparation method of a three-dimensional glass optical waveguide. Background technique [0002] The embedded strip optical waveguide prepared on the glass substrate by ion exchange technology has the advantages of low cost, simple manufacturing method, high mechanical strength, good thermodynamic stability, acid and alkali resistance, small propagation loss, and compatibility with optical fiber coupling. It is widely used in the preparation of various photonic devices and biochemical sensors. This embedded strip glass optical waveguide is a graded refractive index optical waveguide. The refractive index contrast on both sides is very small, and the confinement of guided wave light is very weak. It cannot form a curved waveguide structure with a small radius of curvature, so it is not It is suitable for...

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Problems solved by technology

The refractive index increment of both sides of this ridge-shaped glass optical waveguide decreases with the increase of etching depth, which has a good confinement effect on the zero-order guided mode, but the evanescent field around the ridge is weak. From the development of biochemical sensors Starting from the perspective, it is not conducive to improving the sensitivity of the unit action length

Although the ridge glass waveguide is superior to the embedded strip glass waveguide, there is still a lack of better methods to prepare such three-dimensional glass waveguides

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