Inclined wave surface interfering system based on optical fiber array type space point source array generator

A technology of optical fiber array and wave surface interference, which is applied in the direction of instruments, optical devices, measuring devices, etc., can solve the problems of increased system error, increased processing and installation costs, and the detection accuracy of the three-coordinate machine method can only reach the micron level. Achieve the effect of eliminating the influence of stray light, improving the efficiency of light energy utilization, and conveniently changing

Active Publication Date: 2014-04-30
NANJING UNIV OF SCI & TECH
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Problems solved by technology

The detection accuracy of the three-coordinate machine method can only reach the micron level, which cannot meet the accuracy measurement requirements of the surface shape
Due to the use of a dual optical path structure and no common optical path characteri

Method used

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  • Inclined wave surface interfering system based on optical fiber array type space point source array generator
  • Inclined wave surface interfering system based on optical fiber array type space point source array generator

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Example Embodiment

[0019] Example:

[0020] combine figure 1 and figure 2 , to design a tilted wavefront interference system based on a fiber-optic array type spatial point source array generator. The light source 1 uses a He-Ne laser with a wavelength of 632.8nm; in the fiber-optic coupler module 2, the imported 1 The laser beam is divided into 11 laser beams, and then each of the 11 laser beams is divided into 11 laser beams by a fiber coupler again, and finally the obtained 121 laser beams are respectively introduced into the fiber array 3; the fiber array 3 includes 11×11 The numerical aperture of each optical fiber is 0.2; the field angle of the collimating lens group 5 is ±5°, the effective working aperture of the collimating lens group 5 is Φ118mm, and the focal length of the collimating lens group 5 is 225mm; the viewing angle of the spherical lens group 6 The field angle is ±5°, the effective working aperture of the spherical lens group 6 is Φ80mm, and the focal length of the spheric...

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Abstract

The invention discloses an inclined wave surface interfering system based on a fiber array type space point source array generator. The inclined wave surface interfering system can compensate for local gradients of free-form surface optical elements to reduce interference fringe density, enhance a dynamic range of a detector and achieve the measurement on the complex free-form surface optical elements. According to the inclined wave surface interfering system, an optical fiber array is used for replacing a lens array, and compared with the lens array, the optical fiber array is better in emergent spherical wave quality and controllable in emergent spherical wave divergence angle. Emergent light of all beams of optical fibers in the optical fiber array is led in by the optical fibers in a one-to-one correspondence mode, the light use efficiency is higher than that of an interfering system using the lens array, and meanwhile influences of most stray light can be removed. The on-off of each optical fiber can be controlled independently, and the gating of a point source does not need to be controlled by using a mask plate.

Description

technical field [0001] The invention belongs to the field of optical precision measurement, and relates to an interference measurement device for measuring the surface shape of free-form surfaces and aspheric optical elements. Background technique [0002] Free-form optical elements refer to a class of complex, non-rotationally symmetric optical elements. Not only can obtain better optical quality than the traditional optical surface, but also greatly reduce the volume size of the optical components, and has the advantages of light weight, convenient installation and adjustment, and low cost. Free-form optical components have been widely used in various fields. For example, in order to meet the requirements for the brightness, illuminance, and uniformity of the road surface, and to distribute most of the light on the road surface as much as possible to improve the utilization rate of the light, saddle-shaped lenses are usually used to distribute light to LED street lights. ...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 沈华李嘉朱日宏王念陈磊何勇高志山
Owner NANJING UNIV OF SCI & TECH
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