Inclined wave surface interfering system based on optical fiber array type space point source array generator

Abstract

The invention discloses an inclined wave surface interfering system based on a fiber array type space point source array generator. The inclined wave surface interfering system can compensate for local gradients of free-form surface optical elements to reduce interference fringe density, enhance a dynamic range of a detector and achieve the measurement on the complex free-form surface optical elements. According to the inclined wave surface interfering system, an optical fiber array is used for replacing a lens array, and compared with the lens array, the optical fiber array is better in emergent spherical wave quality and controllable in emergent spherical wave divergence angle. Emergent light of all beams of optical fibers in the optical fiber array is led in by the optical fibers in a one-to-one correspondence mode, the light use efficiency is higher than that of an interfering system using the lens array, and meanwhile influences of most stray light can be removed. The on-off of each optical fiber can be controlled independently, and the gating of a point source does not need to be controlled by using a mask plate.

Description

technical field [0001] The invention belongs to the field of optical precision measurement, and relates to an interference measurement device for measuring the surface shape of free-form surfaces and aspheric optical elements. Background technique [0002] Free-form optical elements refer to a class of complex, non-rotationally symmetric optical elements. Not only can obtain better optical quality than the traditional optical surface, but also greatly reduce the volume size of the optical components, and has the advantages of light weight, convenient installation and adjustment, and low cost. Free-form optical components have been widely used in various fields. For example, in order to meet the requirements for the brightness, illuminance, and uniformity of the road surface, and to distribute most of the light on the road surface as much as possible to improve the utilization rate of the light, saddle-shaped lenses are usually used to distribute light to LED street lights. ...

AI Technical Summary

Problems solved by technology

The detection accuracy of the three-coordinate machine method can only reach the micron level, which cannot meet the accuracy measurement requirements of the surface shape

Due to the use of a dual optical path structure and no common optical path characteristics, the system error increases. In order to ensure the measurement accuracy and compensate for the increase in the system error, higher requirements must be placed on the processing of the device, which increases the cost of processing and installation.

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