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Piezoelectric nanometer generator, eyeball moving monitor sensor and monitor method

A nano-generator and generator technology, applied in the direction of generator/motor, sensor, piezoelectric effect/electrostrictive or magnetostrictive motor, etc., can solve the problems of high cost, complex structure, large volume, etc., and achieve Effect of improving bonding fastness, sensitivity and electrical output performance improvement

Active Publication Date: 2014-05-07
BEIJING INST OF NANOENERGY & NANOSYST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the current instruments used to test the movement of human eyeballs require an external power supply to work, and the structure is complicated, the volume is large, and the cost is high, which makes it difficult for this technology to be widely promoted.

Method used

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  • Piezoelectric nanometer generator, eyeball moving monitor sensor and monitor method
  • Piezoelectric nanometer generator, eyeball moving monitor sensor and monitor method
  • Piezoelectric nanometer generator, eyeball moving monitor sensor and monitor method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0069] Embodiment 1: the preparation of piezoelectric nanogenerator

[0070] An aluminum oxide film was grown on an aluminum film with a length of 5 cm x a width of 1 cm x a thickness of 10 microns by anodic oxidation as the first insulating layer, and a zinc oxide seed layer with a thickness of 100 nm was magnetron sputtered on the aluminum oxide film . Then, a ZnO nanowire array with a thickness of about 2 μm is grown on the ZnO seed layer by a hydrothermal method as a piezoelectric material. Then spin-coat a layer of polyparadimethylsiloxane with a thickness of 20 nm on the ZnO nanowire array as the second insulating layer. Finally, an aluminum thin film with a thickness of 50 nm was prepared as the upper electrode layer on the poly(p-dimethylsiloxane) by a deposition method. The structural diagram of the generator can be found in Figure 7 -a, Figure 7 -b is the electron micrograph of the corresponding structure, Figure 7 -d is a partially enlarged view of the seed ...

Embodiment 2

[0072] Embodiment 2: the preparation of piezoelectric nanogenerator

[0073] An aluminum foil with a length of 3 cm x a width of 2 cm x a thickness of 12 microns is used as the lower electrode layer, and a layer of silicon dioxide film is prepared on it as the first insulating layer, and a layer with a thickness of about A thin layer of polyvinylidene fluoride of 1 μm was used as the piezoelectric layer. Then directly deposit an aluminum thin film with a thickness of about 20 nm on the piezoelectric layer as the upper electrode layer. Connect the upper electrode layer and the lower electrode layer to an external voltmeter through a wire, and apply an external force to the generator, such as rubbing or lightly pressing, the voltmeter will output a corresponding electrical signal, indicating that it can convert mechanical energy into electrical energy for power generation.

Embodiment 3

[0074] Example 3: Preparation of eye movement monitoring sensor based on piezoelectric nanogenerator

[0075] A zirconium aluminate film of the first insulating layer with a thickness of 1 μm is grown on an aluminum film with a length of 20 mm x a width of 5 mm x a thickness of 12 microns by anodic oxidation, and then a layer of lead zirconate titanate seed layer is deposited on the film. A layer of lead zirconate titanate nanorod array is grown on the seed layer as a piezoelectric layer by a hydrothermal method, and a layer of polyparadimethylsiloxane is spin-coated on the nanowire array as a second insulating layer. Finally, a layer of copper film is prepared on the poly-p-dimethylsiloxane as the upper electrode layer, and the upper and lower electrodes are connected and drawn out by wires. The device is fixed on the surface of the upper eyelid with adhesive tape, so that the copper film is in close contact with the upper eyelid. When the human eyeball is moving, an obvious ...

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Abstract

This invention relates to a piezoelectric nanometer generator, an eyeball moving monitor sensor and a monitor method. The piezoelectric nanometer generator comprises a lower electrode layer, a first insulation layer positioned on the upper surface of the lower electrode layer, a piezoelectric layer positioned on the upper surface of the first insulation layer, and an upper electrode layer positioned above the piezoelectric layer. The thickness of the generator is less than 20 Mum. The flexible piezoelectric nanometer generator is constructed by utilizing the piezoelectric properties possessed by piezoelectric thin film materials and the eyeball moving monitor sensor is manufactured based on the piezoelectric nanometer generator. The ultrathin flexible piezoelectric generator is attached on the surface of the eyelid. When the eyeball is moving, the pressure applied by the eyeball on the eyelid changes constantly along the moving, which causes the stress on the eyelid to change, and the change acts on the piezoelectric generator so as to output electric signals to the outside. The eyeball moving monitor sensor disclosed by the invention can perform long time monitor on human eyes, and is low in cost, easy for carrying and simple in structure.

Description

technical field [0001] The invention relates to a nanometer generator, in particular to an ultra-thin piezoelectric nanometer generator and an eyeball movement monitoring sensor based on the generator. Background technique [0002] Since the nanogenerator was first reported in 2006, it has attracted the attention of the world for its tiny structure, effective collection of environmental energy and self-driving characteristics, attracting a large number of researchers to follow up on it. However, the nanogenerators reported so far, especially the piezoelectric nanogenerators, all have the problem of relatively large thickness. Generally, the overall thickness is 1-5mm, and some even reach the centimeter level. This will lead to the need to consume more energy to make the generator deform and work, thereby limiting its perception of small deformation and collection of small energy. On the other hand, in the existing piezoelectric nanogenerators, the insulating layers used bet...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/18A61B5/00A61B5/16
Inventor 王中林李尙玟杨亚
Owner BEIJING INST OF NANOENERGY & NANOSYST
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