SPR sensor cell and SPR sensor
A sensor element and detection unit technology, applied in the direction of optical components, instruments, scientific instruments, etc., can solve the problems of fixed analysis samples and difficult formation of metal films, etc., and achieve the effect of excellent detection sensitivity
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Embodiment 1
[0069] By using such as image 3 The stamper systems shown in (a) to 3(e) form optical waveguides. Specifically, a fluorine-based UV curable resin ("OP38Z" (trade name), manufactured by DIC Corporation) as a material for forming the under clad layer was applied to a mold having a core layer corresponding to the under clad layer Forming part of the protrusion, the resin is cured with ultraviolet light to form the lower cladding. The refractive index of the lower cladding layer thus obtained was 1.372. The lower cladding has a length of 80 mm, a width of 80 mm, and a thickness of 150 μm, and a groove portion having a width of 50 μm and a thickness (depth) of 50 μm for forming the core layer is formed in the lower cladding. After the under cladding layer was peeled off from the mold, the groove portion was filled with a fluorine-based UV-curable resin (“OP40Z” (trade name), manufactured by DIC Corporation) as a material for forming a core layer to form a core layer. The refrac...
Embodiment 2
[0074] An SPR sensor element and an SPR sensor were produced in the same manner as in Example 1 except that a cap layer (thickness: 20 nm) was formed by sputtering zinc selenide (ZnSe). The SPR sensor thus obtained was evaluated in the same manner as in Example 1. Table 1 shows the results.
Embodiment 3
[0076] An SPR sensor element and an SPR sensor were produced in the same manner as in Example 1 except for forming a cover layer (thickness: 40 nm) by sputtering zinc selenide (ZnSe). The SPR sensor thus obtained was evaluated in the same manner as in Example 1. Table 1 shows the results.
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