Open-loop power self-control crystal growth control method without temperature signal treatment

Abstract

The invention discloses an open-loop power self-control crystal growth control method without temperature signal treatment. In the method, a power open loop control system of a shoulder putting process step and a power open loop control system of an equal-diameter process step are utilized, a direct control power control mode is adopted to avoid signal evaluation and treatment of a temperature signal tester, a power control module is directly adopted to perform a closed loop control mode and supplement each other with a diameter casting speed closed loop control mode in order to form a unique crystal power control mode, thereby effectively solving the condition of crystal growth failure resulting from abnormal power fluctuation and temperature impact in a monocrystalline silicon rod growth process, greatly improving the continuity of the monocrystalline silicon rod, improving the production efficiency, perfecting the anti-interference performance, reducing the production cost (about 25%) and greatly improving the yield of the product (about 32%).

Description

technical field [0001] The invention relates to the field of CZ Czochralski single crystal furnace control system manufacturing, in particular to an open-loop power self-controlled crystal growth control method without temperature signal processing. Background technique [0002] In daily life, silicon single crystal can be said to be ubiquitous. Crystalline silicon is an indispensable raw material for televisions, computers, telephones, refrigerators, watches, automobiles, space shuttles, spaceships, satellites, etc. In particular, it marks the beginning of the green energy revolution—the invention and application of solar cells, which not only indicates that the utilization of solar crystalline silicon will be popularized all over the world, but also indicates that the demand for silicon materials will increase day by day. Because of the various advantages of silicon single crystal, the demand for silicon single crystal growth equipment and control system has increased rap...

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Problems solved by technology

[0006] The present invention mainly proposes an open-loop power self-controlled crystal production system without temperature signal processing, which solves the crystal growth failure caused by abnormal power fluctuations and temperature shocks during the growth of single crystal silicon rods, and greatly improves the continuous production of crystal silicon rods ,Increase productivity

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