Miniature piezoelectric vibration energy collector and manufacturing method thereof
An energy harvester, piezoelectric vibration technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc. Solve problems such as the inability to break through the bottleneck of PZT film thickness, the inability to directly apply micromachining in thickness, and the attenuation of AlN piezoelectric properties, so as to avoid high cost, save process steps, and increase device sensitivity.
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[0040] The present invention will be further described below in conjunction with specific drawings.
[0041] Such as Picture 11 Shown: the novel MEMS piezoelectric vibration energy collector structure of the present invention includes a substrate 101; the substrate is provided with double-sided release barrier strips 102, 103; the front barrier strip 102 has a metal conductive layer (bottom) 301; On the metal conductive layer (bottom) 301, the piezoelectric ceramic sheet 601 and the metal conductive layer (bottom) are connected by conductive glue 501. Before preparing the conductive glue layer 501, it is necessary to prepare patterned light on the metal conductive layer (bottom) 301 in advance. Resist 401; the bond and the subsequent piezoelectric ceramic sheet 601 are thinned and wet etched to a suitable thickness 701, and then the metal conductive layer (top) is deposited on the entire sheet, so that the metal layer above the piezoelectric ceramic sheet serves as the top electr...
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