An Electroconjugate Fluid Micropump

Abstract

The invention discloses a mini electric conjugate fluid pump. An integrated structure is formed by a triangular prism electrode, a strip gap electrode and a flow passage groove of the mini electric conjugate fluid pump through an ultraviolet lithography processing technology, so that the triangular prism electrode and the strip gap electrode have high centering precision and good jet performance, two sides of the strip gap electrode and the wall of the flow passage groove form an integrated tight connection structure with good sealing property, so that irregular flow of the electric conjugate fluid between different electrode pairs is avoided, and the jet efficiency is improved; the integrated structure is formed by the triangular prism electrode, the strip gap electrode, the flow passage groove and a conductive band through an ultraviolet lithography processing technology, so that the mini electric conjugate fluid pump has a more compact and reasonable structure, a small size and large power density; through a bonding assembly manner between an upper cover board and a lower shell, the outer overall dimension is small and the power density is large. Miniaturization of the electric conjugate fluid pump is implemented.

Description

technical field [0001] The invention relates to a fluid pump, in particular to an electric conjugate fluid micropump. Background technique [0002] Electroconjugate fluid is a special functional insulating fluid with good electrohydrodynamic properties. When a metal electrode immersed in it is applied with a DC voltage of hundreds of volts, the fluid between the electrodes will generate directional flow and form a jet. And the jet intensity increases significantly with the increase of the input voltage, this phenomenon is called the electric conjugation effect. [0003] The electric conjugate fluid pump is a fluid machine that can output a fluid with a certain pressure and flow rate, which is made by using the electric conjugate effect. As a new type of pump, the electric conjugate fluid pump has the advantages of no mechanical movement mechanism, direct energy conversion, high power density, compact structure, small volume, and no operating noise; it can be widely used in ...

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Problems solved by technology

The size of its core component (electrode) is relatively large. When assembling, it is necessary to accurately position the triangular prism electrode (array) and the gap electrode (array) in the lower shell, which is affected by structural design, electrode (array) processing technology, assembly errors, etc. Influenced by various factors, the coordination accuracy between the triangular prism electrode and the gap electrode in the fluid pump is difficult to meet the design requirements, and the output performance of the fluid pump is not ideal; the electric conjugate fluid flows into the next triangular prism electrode at an accelerated rate from the gap of the gap electrode— The gap electrode is external, and the electrically conjugated fluid will flow irregularly from the gap between the gap electrode and the lower casing, which also reduces the jet efficiency; the bolts are used to connect the upper cover plate and the lower casing, resulting in excessive external dimensions of the fluid pump. large, reducing its power density

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