Pressure and differential pressure measuring device based on pore passage double electric layer effect
A technology of differential pressure measurement and pressure, which is applied in the detection field, can solve the problems of short measurement error data collection time, reliability, reduced accuracy, difficulty in application, etc., and achieve the effects of large measurement range, environmental friendliness, and high sensitivity
Inactive Publication Date: 2014-06-25
WUHAN UNIV
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Problems solved by technology
In particular, the size of devices and equipment made by micro-electromechanical systems (MEMS) and system-on-chip (System on Chip) technology is extremely small, and the measured space size is at the micro-nanometer level, which puts higher requirements on the measurement components; and because The size is very small, the measurement error and accuracy requirements are higher than those of the large size measurement, the data acquisition time is short, and the device requires intelligence, which makes some traditional pressure measurement methods inapplicable or not accurate enough
In addition, due to the limitations of the measurement principle, some traditional measurement methods are difficult to apply at the micro-nano scale, and some pressure measurement methods with mechanical rotating parts will greatly reduce the reliability and accuracy
Method used
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[0025] (1) Magnetron sputtering treatment of alumina nanoporous film, the process is as follows figure 2 Shown: First, a layer of chromium with a thickness of 15 nm and a layer of silver with a thickness of 100 nm are sputtered on one side of the alumina nanoporous film by magnetron sputtering, and then a layer of insulating material is welded on the surface of the silver layer. The silver wire of the material is then deposited on the surface of the silver layer by electrodeposition with a thickness of 100 nm of silver chloride; on the other side of the aluminum oxide nanoporous film, a layer of 15 nm thick is sequentially sputtered by magnetron sputtering. Chromium and a layer of 100 nm thick silver, and then a silver wire wrapped with insulating material is welded on the surface of the silver layer to complete the magnetron sputtering treatment of the alumina nanoporous film.
[0026] (2) as image 3 As shown, the aluminum oxide nanoporous film 3 that has undergone magnetr...
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The invention discloses a pressure and differential pressure measuring device based on a pore passage double electric layer effect. A metal layer is plated on the inner wall of a pore passage of a porous membrane, ions in an electrolyte generate the double electric layer effect in the pore passage when the electrolyte is driven by pressure to flow through the pore passage, current is generated in a closed circuit formed by the pore passage and a signal collection device, current or voltage signals in the circuit are collected, and then a pressure or differential pressure value can be obtained through calculation. The pressure and differential pressure measuring device is provided with no mechanical rotating components, is simple in structure, stable and reliable, does not need to be driven by an external power supply device, and is free from pollution and noise, and environmentally friendly. The pressure and differential pressure measuring device can be applicable to liquid, gas and the like, and even the fluid contains solid suspended particles. According to the pressure and differential pressure measuring device based on the pore passage double electric layer effect, measurement of different ranges can be achieved based on different pore passage sizes and liquid containing different ions, sensitivity is extremely high, and the measurement span is large.
Description
[0001] technical field [0002] The invention belongs to the detection field, and relates to a pressure and differential pressure measuring device based on the effect of the electrical double layer of the channel. Background technique [0003] Pressure and pressure difference are common parameters in industrial production practice. Their measurement and data collection are widely used in various equipment and devices, involving water conservancy and hydropower, production automation, aerospace, military industry, petrochemical, medical and many other industries. In addition, people can indirectly obtain physical parameters such as temperature, flow rate and liquid level through the measured pressure. The requirements for pressure and differential pressure measurement in different fluid electrolytes make the measurement methods different and have their own characteristics. [0004] At present, the measurement principles of pressure sensors include piezoresistive, capacitive,...
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IPC IPC(8): G01L9/18G01L13/06
Inventor 程婷刘抗胡雪蛟阚伟民肖晓清李昌铮
Owner WUHAN UNIV