Optical fiber amplifier dynamic gain slope equalizer and manufacturing technology thereof
A fiber amplifier and dynamic gain technology, applied in optics, instruments, optical components, etc., can solve problems such as signal power imbalance between DWDM channels, and achieve important practical value, low cost, and high yield
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Embodiment 1
[0062] In view of the shortcomings of current DGE and DGSE device technologies such as high cost, large insertion loss, high drive power consumption, and large volume, this invention proposes a technical solution for a dynamic gain slope equalizer based on MEMS technology, using a MEMS two-degree-of-freedom micro-displacement driver, A free-space optical MZI with independent tunable optical splitting ratio and optical phase, featuring low insertion loss, large spectral slope equalization range, fast tuning, low drive power consumption, low cost, and small size, and can be directly integrated with GFF Into EDFA, thereby solves the problem of EDFA dynamic gain equalization. At the same time, it can also be applied to solve the problem of signal power imbalance between DWDM channels caused by transmission optical fiber, optical fiber dispersion compensation module, optical fiber stimulated Raman scattering (SRS) effect, etc.
[0063] see image 3, the fiber amplifier dynamic gai...
Embodiment 2
[0090]In this embodiment, both the first optical micro-mirror and the second optical micro-mirror are movable MEMS micro-mirrors.
[0091] The micro-displacement adjustment unit includes an electrostatic comb driver and an electrostatic plate driver.
[0092] The electrostatic comb driver is located on both sides of the silicon frame, and is suspended above the MEMS optical micromirror driver chip substrate by a group of silicon elastic beams, and is connected with the MEMS optical micromirror driver chip substrate; The electrostatic comb driver is used to control the micro-displacement movement of the first optical micro-mirror in the horizontal direction, so as to realize the tuning of the MZI beam splitting ratio.
[0093] In this embodiment, the electrostatic flat panel driver includes a first electrode plate and a second electrode plate; the first electrode plate is located under the first optical micro-mirror, and the second optical micro-mirror is plated on it, and the ...
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