an x-ray source

Abstract

The invention discloses an X-ray source. The X-ray source comprises an X-ray generating and transmitting assembly, a water cooling temperature control assembly and a working circuit. The X-ray generating and transmitting assembly comprises a copper bar, a ceramic pipe, a main pipe, a target head, an anode target A and an anode target B, wherein the anode target A and the anode target B are located on two wedge-shaped faces of the target head respectively, an Mg layer and an Al layer are evaporated on the anode target A and the anode target B respectively. The water cooling temperature control assembly comprises a water cooling outer cylinder, a water cooling inner cylinder and an installation flange, wherein circulating cooling water inside the installation flange cools the main pipe, the cooling water inflows through the water cooling inner cylinder and flows out of the water cooling outer cylinder, and the target head is cooled in a double-layer water cooling mode. Target materials are evaporated on the target head to form the anode targets so that the anode targets can make direct contact with the cooling water. The temperature of the anode targets and the flow of the cooling water can be monitored in real time. Thus, a device can be kept at a low temperature in the use process through the water cooling structure, and the device can stably run in a vacuum.

Description

technical field [0001] The invention relates to an X-ray generating device, in particular to an X-ray source. Background technique [0002] X-rays are used in X-ray diffraction (XRD) or X-ray photoelectron spectroscopy (XPS), depending on their wavelength range. [0003] The X-ray wavelength used for XRD is close to the atomic distance of the material. According to the principle of Bragg diffraction, the information of the atomic distance and the arrangement period can be obtained. XRD is the most effective means of material structure analysis, and plays an irreplaceable role in analyzing material structure and mechanism. The wavelength of X-rays used in XPS is relatively long relative to the atomic interval, and its energy is equivalent to that of electrons in matter, which can excite photoelectrons based on the principle of photoelectric effect. Therefore, XPS is an important means to analyze the electronic state of matter. [0004] The main goal of physical science res...

AI Technical Summary

Problems solved by technology

The traditional X-ray source only has a single anode target that can only produce one type of X-ray, and it is inconvenient for users to replace the anode target when another type of X-ray is needed; when working in a vacuum environment, it will reduce due to the large amount of heat generated. The vacuum degree of the vacuum environment, the reduction of the vacuum degree will reduce the service life of the filament and reduce the accuracy of the XPS experimental results; the X-rays generated are doped with hot electrons, which will also reduce the accuracy of the XPS experimental results

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