Pink gold target for vacuum magnetron sputtering and preparation method thereof
A vacuum magnetron sputtering, pink technology, applied in the direction of sputtering coating, vacuum evaporation coating, metal material coating process, etc., to achieve the effect of high surface hardness, uniform color, good oxidation resistance and anti-sulfurization
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Embodiment 1
[0025] Prepare Au according to the ratio, Pd, Fe, Cu, Cr and In as raw materials; heat and melt Au, then put Pd into the melted Au, when Au and Pd melt together, add Fe, Cu to the AuPd melt in turn , Cr and In;
[0026] When all the metal is melted, stir the metal melt evenly, then heat it to 1200~1300℃, keep it warm for 3~5min for refining;
[0027] Pour the refined metal melt into a mold preheated to 100~150°C, and air cool to room temperature to obtain a slab;
[0028] The slab is milled, rolled, annealed, sheared and leveled to make a pink gold target for vacuum magnetron sputtering. The composition contains Au 85.0%, Pd 6.5%, Fe 3.0% by weight, Cu 2.5%, Cr 2.5%, In 0.5%, chroma value range: a*=2.7, b*=12.9.
Embodiment 2
[0030] Prepare Au according to the ratio, Pd, Fe, Cu, Cr and In as raw materials; heat and melt Au, then put Pd into the melted Au, when Au and Pd melt together, add Fe, Cu to the AuPd melt in turn , Cr and In;
[0031] When all the metal is melted, stir the metal melt evenly, then heat it to 1200~1300℃, keep it warm for 3~5min for refining;
[0032] Pour the refined metal melt into a mold preheated to 100~150°C, and air cool to room temperature to obtain a slab;
[0033] The billet is milled, rolled, annealed, sheared and leveled to make a pink gold target for vacuum magnetron sputtering. The composition contains Au 88.0%, Pd 5.5%, Fe 2.5% by weight, Cu 2.0%, Cr 1.0%, In 1.0%, chroma value range: a*=2.9, b*=13.2.
Embodiment 3
[0035] Prepare Au according to the ratio, Pd, Fe, Cu, Cr and In as raw materials; heat and melt Au, then put Pd into the melted Au, when Au and Pd melt together, add Fe, Cu to the AuPd melt in turn , Cr and In;
[0036] When all the metal is melted, stir the metal melt evenly, then heat it to 1200~1300℃, keep it warm for 3~5min for refining;
[0037] Pour the refined metal melt into a mold preheated to 100~150°C, and air cool to room temperature to obtain a slab;
[0038] The slab is milled, rolled, annealed, sheared and leveled to make a pink gold target for vacuum magnetron sputtering. The composition contains Au 90.0%, Pd 4.5%, Fe 2.0% by weight, Cu 1.5%, Cr 1.5%, In 0.5%, chroma value range: a*=3.6, b*=14.5.
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