Preparation method for inner hole coating of tubular part

A technology for tubular parts and parts, which is applied in the field of preparation of inner hole coatings of tubular parts, can solve problems such as arcing on the inner wall, and achieve the effects of improving bonding force, increasing density and uniformity, high efficiency and uniform axial deposition

Active Publication Date: 2014-07-23
NO 59 RES INST OF CHINA ORDNANCE IND
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  • Abstract
  • Description
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AI Technical Summary

Problems solved by technology

The preparation method of the wear-resistant composite coating for slender tubular parts of the present invention is proposed, which solves the problem of arc ignition on the inner wall of slender tubular parts with a large aspect ratio during PECVD, and realizes the wear-resistant composite coating used under high temperature conditions on the inner wall of slender tubular parts. Uniform preparation of coatings

Method used

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  • Preparation method for inner hole coating of tubular part
  • Preparation method for inner hole coating of tubular part
  • Preparation method for inner hole coating of tubular part

Examples

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Embodiment 1

[0039] Embodiment 1: a kind of preparation method of inner hole coating of tubular part, comprises the following steps:

[0040] A. Preparing for Coating Deposition

[0041] Pretreatment of tubular parts before coating: Grinding and polishing the inner hole of tubular parts until the roughness reaches Ra0.8~Ra1.6, cleaning with alcohol and acetone for 2 to 3 times in turn, and then cleaning in acetone with ultrasonic waves for 10min to 15min , Dry the tubular parts at 60°C for 1 hour after taking them out.

[0042] Install tubular parts (see Figure 4 , 5 , 6, 7, 8):

[0043] Place the tubular part 6 with an inner bore diameter of 35 mm and a length-to-diameter ratio of 4.4 in the air on a tubular support 12 with four screw holes on the tube wall held up by three support rods 11, between the support rod 11 and the tubular support 12 The space is connected by an insulating ceramic body 14, the support rod 11 is installed on the base 41 of the vacuum chamber 4, the base 41 ...

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Abstract

The invention relates to a preparation method for an inner hole coating of a tubular part. The tubular part is arranged in a coating deposition device comprising an auxiliary electrode having air conduction function, a TiCl4 liquid storage tank and a tubular part clamping jig, and then placed in a vacuum chamber for vacuum pumping, argon (Ar) is introduced, a bias power supply is turned on for glow cleaning of the tubular part, reaction gases of H2, TiCl4, N2 and BCl13 are introduced, and the introduction of N2 and BCl13 is alternately switched so as to achieve the deposition of TiN and TiB2. By means of the tubular part coating deposition device, the problems of sheath layer overlapping, low ion energy and poor coating bonding force caused by limited space are solved, the problems of rapid depletion, low density and axial non-uniformity of plasma entered due to external diffusion are solved, the density and the uniformity of the plasma in a tube are improved, and high-efficiency and axial uniform deposition are achieved.

Description

technical field [0001] The invention relates to a method for preparing an inner hole coating of a tubular part, in particular to a method for preparing a wear-resistant composite coating on the surface of a deep inner hole of an elongated tubular part. Background technique [0002] In recent years, wear-resistant coating materials and coating technologies used under high-temperature conditions that have been studied by various countries include refractory metals such as Ta, Mo, W, Re, Nb, Hf and their alloys, and ceramic body coatings such as TiB2 and ZrO2. , the coating structure is developing towards the direction of multi-layer multi-function, and its preparation technology includes laser coating, plasma flame coating, high-velocity oxygen-fuel thermal spraying, wire explosion spraying, and plasma-enhanced vapor deposition, among which vapor deposition is difficult to achieve The reliable deposition of melting, flame-retardant, and ablation-resistant materials has been wi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/44C23C16/38C23C16/34
Inventor 吴护林张隆平孙彩云何庆兵陈海涛罗明波
Owner NO 59 RES INST OF CHINA ORDNANCE IND
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