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A method for preparing a large-scale carbon/silicon carbide composite heat-insulating bottom plate

A carbon composite material and composite material technology are applied in the field of preparation of large-sized carbon/silicon carbide composite thermal insulation bottom plates, which can solve the problems of carbon material erosion, carbon fiber and matrix carbon fall off of thermal insulation bottom plates, product failure, etc. The effect of shortening manufacturing cycle, improving production efficiency and reducing processing cost

Active Publication Date: 2015-07-29
XIAN CHAOMA SCI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

During the thermal hydrogenation of polysilicon, silicon-containing gases (including silicon tetrachloride and trichlorosilane) can chemically react with carbon materials (matrix carbon and carbon fibers), causing the carbon materials to be eroded, making the heat-insulating floor carbon fibers and The matrix carbon falls off and gradually becomes thinner, eventually leading to product failure

Method used

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  • A method for preparing a large-scale carbon/silicon carbide composite heat-insulating bottom plate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Step 1. According to the shape and performance requirements of the heat insulation floor to be prepared, use conventional methods to make a density of 0.20g / cm by using carbon fiber, carbon cloth and mesh tires 3 carbon fiber preform, and then the carbon fiber preform is densified to a density of 0.80g / cm 3 The carbon / carbon composite material; the method of densification is: carbon fiber prefabricated body is placed in chemical vapor deposition furnace, adopts propylene (also can adopt natural gas or the mixed gas of propylene and natural gas) to carry out chemical vapor phase as carbon source gas Infiltration, the process parameters of chemical vapor infiltration are: the flow rate of carbon source gas is 50L / min, the temperature of chemical vapor infiltration is 900°C, and the holding time is 30h; then the carbon fiber preform after chemical vapor infiltration is placed in an impregnation furnace , carry out furfurone resin pressure impregnation under the condition o...

Embodiment 2

[0034] Step 1. According to the shape and performance requirements of the heat insulation floor to be prepared, use conventional methods to make a density of 0.50g / cm by using carbon fiber, carbon cloth and mesh tires 3 carbon fiber preform, and then the carbon fiber preform is densified to a density of 1.0g / cm 3 carbon / carbon composite material; the method of densification is: carbon fiber prefabricated body is placed in chemical vapor deposition furnace, adopting the mixed gas of propylene and natural gas (also can adopt propylene or natural gas) that the volume ratio is 1:1 Chemical vapor infiltration is carried out as carbon source gas. The process parameters of chemical vapor infiltration are: the flow rate of carbon source gas is 200L / min, the temperature of chemical vapor infiltration is 1100°C, and the holding time is 60h; then the carbon fiber after chemical vapor infiltration The prefabricated body is placed in an impregnation furnace, and the phenolic resin pressure...

Embodiment 3

[0040] Step 1. According to the shape and performance requirements of the heat insulation floor to be prepared, use conventional methods to make a density of 0.40g / cm by using carbon fiber, carbon cloth and mesh tires 3 carbon fiber preform, and then the carbon fiber preform is densified to a density of 0.9g / cm 3 The carbon / carbon composite material; the method of densification is: carbon fiber prefabricated body is placed in chemical vapor deposition furnace, adopts natural gas (also can adopt the mixed gas of propylene or propylene and natural gas) to carry out chemical vapor phase as carbon source gas Infiltration, the process parameters of chemical vapor infiltration are: the flow rate of carbon source gas is 100L / min, the temperature of chemical vapor infiltration is 1000°C, and the holding time is 45h; then the carbon fiber preform after chemical vapor infiltration is placed in an impregnation furnace , carry out pressure impregnation of phenolic resin and furfurone resi...

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Abstract

The invention discloses a preparation method of large-sized carbon / silicon carbide composite heat-insulting baseplates. The method comprises the following steps: I, densifying a carbon fibre preform so as to obtain a carbon / carbon composite; II, machining the carbon / carbon composite so as to obtain a carbon / carbon composite heat-insulting baseplate; III, uniformly laying first silicon slurry on a board, placing the carbon / carbon composite heat-insulting baseplate on the first silicon slurry, and uniformly laying second silicon slurry on the carbon / carbon composite heat-insulting baseplate so as to obtain an assembly; and IV, putting the assembly into a heating furnace to carry out reaction infiltration processing, so that a carbon / silicon carbide composite heat-insulting baseplate is obtained after the assembly is taken out of the furnace; or, after multiple assembles are stacked, putting the assembles into a heating furnace to carry out reaction infiltration processing, so that a carbon / silicon carbide composite heat-insulting baseplate is obtained after the assemblies are taken out of the furnace. Compared with carbon / carbon composite heat-insulting baseplates, the service life of a carbon / silicon carbide composite heat-insulting baseplate prepared by using the method disclosed by the invention is increased by over 50%, and can reach more than 18 months.

Description

technical field [0001] The invention belongs to the technical field of preparing thermal field components for polysilicon hydrogenation furnaces, and in particular relates to a method for preparing a large-scale carbon / silicon carbide composite heat-insulating bottom plate. Background technique [0002] At present, carbon / carbon composite materials are generally used for heat insulation bottom plates of polycrystalline silicon hydrogenation furnaces. During the thermal hydrogenation of polysilicon, silicon-containing gases (including silicon tetrachloride and trichlorosilane) can chemically react with carbon materials (matrix carbon and carbon fibers), causing the carbon materials to be eroded, making the heat-insulating floor carbon fibers and The matrix char falls off and gradually thins, eventually leading to product failure. Therefore, how to effectively suppress the erosion of carbon materials is a key technical issue to improve the service life of the insulating botto...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/83C04B35/80C04B35/52C04B35/622
Inventor 张永辉肖志超李睿李永军苏君明侯卫权彭志刚孟凡才
Owner XIAN CHAOMA SCI TECH
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