Film Coating System Capable Of Performing Thin Film Deposition In Rigorous Evaporation Environment

A technology of coating system and evaporation system, which is applied in the field of material deposition, can solve the problems that QCM and thermocouple cannot be used in evaporation coating system, and cannot withstand corrosion and reaction atmosphere, so as to reduce the preparation cost and ensure the uniformity effect

Inactive Publication Date: 2014-09-10
奥昱公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, there are cases where neither QCMs nor thermocouples can be used in evaporative coating systems due to the harsh environment in the process cha

Method used

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  • Film Coating System Capable Of Performing Thin Film Deposition In Rigorous Evaporation Environment
  • Film Coating System Capable Of Performing Thin Film Deposition In Rigorous Evaporation Environment
  • Film Coating System Capable Of Performing Thin Film Deposition In Rigorous Evaporation Environment

Examples

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Embodiment Construction

[0020] refer to figure 1 , the coating system 100 includes a vacuum process chamber 105 , and a conveying mechanism built in the chamber is used to move a substrate 110 in a direction 111 . The transport mechanism may include unwind rolls 120 and take-up rolls 125 which may transport a film (or flexible) substrate. The evaporation system 140 includes a crucible 142 for holding an evaporation material 145 such as copper. The evaporation system further includes a heater 147 for heating the evaporation material 145 in the crucible 142 and vaporizing it. After the process chamber is evacuated, the heater 147 heats the crucible 142 to increase the temperature of the evaporation material 145 above the evaporation point. Vapor consists of atoms and groups of atoms of the vaporized material. The vapor stream is delivered to the substrate 110 and deposits a thin film of evaporated material on the substrate. Moving the substrate by the transport mechanism causes the evaporation mate...

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Abstract

A film coating system and a material deposition method are disclosed. The film coating system can accurately control deposition of a film material in a rigorous evaporation environment, avoids measuring or monitoring of temperature or the thickness of a film layer, and reduces the cost for film preparation. The film coating system can achieve a needed thickness of the film layer and guarantee the uniformity of the film layer. The material deposition method includes: putting an evaporation material into a crucible in a vacuum process chamber, heating the evaporation material in the crucible by controlling the output power of a heater controlled by a heater controller with the heater controller being based on a physical model and a virtual temperature sensor model, calculating a first temperature by the physical model, calculating a second temperature by the virtual temperature sensor model, adjusting the power of the heater based on the difference between the first temperature and the second temperature; generating film material steam, and depositing the film material onto a substrate by condensation of the film material steam on the substrate.

Description

technical field [0001] The invention relates to material deposition technology, in particular to an evaporation coating system. Background technique [0002] In a conventional evaporation coating system, it is necessary to use a quartz crystal microbalance (QCM) to monitor the film thickness online. Usually, the QCM is installed close to the substrate so that it can be covered by the film material. The QCM processes and sends the signal to a controller that regulates power to the heater for the crucible that holds the evaporated material. Thermocouples or other temperature sensors can also be used to measure the temperature of the crucible in order to control the power to the crucible and thus the evaporation deposition rate. [0003] However, there are cases where neither QCMs nor thermocouples can be used in evaporative coating systems due to the harsh environment within the process chamber. For example, evaporatively deposited CIGS thin films, neither QCMs nor thermocou...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/54
Inventor 丁坤宝黄仲漩王开安
Owner 奥昱公司
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