39results about How to "Achieve anisotropy" patented technology

A circulating etching method of a silicon nitride hole with high depth-to-width ratio comprises of the steps of 1 adopting a dry-method plasma process and fluorocarbon-based gas to perform silicon nitride thin film etching so as to form the hole and meanwhile generating a polymer depositing on the bottom and the side wall of the hole; 2 feeding oxidizing gas and diluting gas into an etching cavity. The deposition amount of fluorocarbon on the side wall of the deep hole can be controlled, the polymer depositing on the bottom of the deep hole can be removed so as to ensure continuous etching, and the two steps are repeatedly performed till the etching profile of the hole meets the requirement. When the fluorocarbon-based gas in the step 1 is increased and accordingly the fluorocarbon amount is increased, the hole is slightly oblique. When the oxidizing gas in the step 2 is increased, the hole is upright. Different hole etching profiles can be obtained as required by adjusting parameters to be between the two amounts.

The invention discloses a method for etching a metal tungsten material, which is characterized in that: an etching mask is formed on the metal tungsten material, and then a high-density plasma (such as inductively coupled plasma, transformer coupled plasma and the like) dry etching process is adopted to produce high-density and high-energy ions and free radicals and to realize the high-speed and anisotropic etching of the metal tungsten material. The etching speed can reach 2.95 micrometers per minute, and the verticality of an etching-resulted side wall can reach 60 degrees. Based on the method, a metal tungsten underlay substrate can be used as a main body material for preparing micro-electro-mechanical system (MEMS) devices.

The invention discloses a method for etching a metal molybdenum material. The method comprises the following steps of: forming an etching mask on the metal molybdenum material; and generating high-density and high-energy ions and free radicals by adopting a high-density plasma (such as ICP (Inductively Coupled Plasma), TCP (Transformer Coupled Plasma) and the like) dry etching process to realize high-speed and anisotropic etching of the metal molybdenum material. The etching speed can be up to 2.63 microns per minute, and the vertical degree of an etching result side wall can be up 70 degrees. On the basis of the method disclosed by the invention, a metal molybdenum substrate can be taken as a main body material for preparing an MEMS (Micro Electro Mechanical System) device.

The invention discloses a metalized wood functional material and a preparation method thereof. The metalized wood functional material is made of four types of materials of tall grass plant stalk, woodcomposite powder, tin-bismuth alloy and natural resin in a compound manner. The preparation method of the metalized wood functional material comprises six steps of plant stalk pretreatment, wood composite powder preparation, plant stalk threading, raw material mat formation, die forming and cutting. The metalized wood functional material prepared by adopting the method is high in strength and good in isotropy, electrical conductivity, heat-conducting performance and anisotropy, can be widely used in the fields such as electromagnetic shielding, system heat management and broad spectrum building materials, and is environmentally friendly.

The invention discloses a multilayer optical thin film and a manufacturing method of the multilayer optical thin film. The multilayer optical thin film is characterized in that the thin film is formed by compounding one to 10,000 optical thin film units, and the thickness is 0.11 micron to 5,000 microns; each optical thin film unit is formed by compounding a layer of * material thin film and a layer of . material thin film, the thickness speciation of the * material thin films is 0.053 micron to one micron, and the thickness speciation of the . material thin films is 0.053 micron to one micron; the * material thin film and the . material thin film in the same optical thin film unit are different in refractive index. The multilayer optical thin film is manufactured in the mode of carrying out multilayer coextrusion through two extruders and then carrying out unidirectional or bidirectional stretching. The multilayer optical thin film has the functions of totally reflecting visible light and ultraviolet light, filtering 550nm green light and the like, and can be applied to manufacturing of building curtain wall reflecting thin films, automobile glass sticker thin films and reflecting telescopes.

The invention provides a thermal insulation workpiece based on fused deposition modeling and a preparation method thereof. Taking advantage of the designability of 3D printing, design optimization iscarried out from the following three aspects: material body-introduction of low thermal conductivity filler and microstructure into thermoplastic polymer-introduction of low melting point phase changematerial and printing process through design of a two-component spray head-introduction of sodium bicarbonate powder combined with post-treatment heating to improve the porosity of the workpiece. Thesynergistic effect of three aspects realizes excellent thermal insulation performance of the workpiece. Besides, a line deposited by adopting the spray head in the 3D printing process has a skin-corestructure, the change of micro-components of the deposited line can be realized by changing process parameters according to actual requirements, the regulation and control of microscopic performanceare realized, and further, the macroscopic anisotropy of the workpiece is realized.

The invention relates to a heat-insulating material, particularly relates to a polyether-ether-ketone modified pelletizing material with low heat-conducting coefficient as well as application thereof,and belongs to the technical field of a macromolecular modified material. The polyether-ether-ketone modified pelletizing material with low heat-conducting coefficient is obtained by extruding and pelletizing the following components in percentage by mass: 60 to 89.9 percent of polyether-ether-ketone resin, 10 to 39.5 percent of modified diatomite and 0.1 to 5 percent of carbon nanotube; the modified diatomite is obtained by sequentially performing purification, modification and roasting treatment on roasted diatomite and/or fluxing roasted diatomite raw materials; and the roasting temperature of the roasted diatomite and/or fluxing roasted diatomite raw materials is not less than 450 DEG C and the roasting time of the roasted diatomite and/or fluxing roasted diatomite raw materials is not less than 2 hours. Compared with the common polyether-ether-ketone modified pelletizing material, the polyether-ether-ketone modified pelletizing material with low heat-conducting coefficient has better heat-insulating effect and has high strength and size stability.

The invention provides an ultrasonic-assisted laser micro-cladding device for a gradient functional composite material. The ultrasonic-assisted laser micro-cladding device comprises a rack, a preset piece sample preparation assembly and an ultrasonic-assisted laser micro-cladding assembly, wherein the preset piece sample preparation assembly and the ultrasonic-assisted laser micro-cladding assembly are installed on the rack. The ultrasonic-assisted laser micro-cladding assembly comprises a laser micro-cladding head assembly and an ultrasonic-assisted workbench assembly. The invention also provides an ultrasonic-assisted laser micro-cladding method for the functional gradient composite material, which comprises the following steps: in the early stage of implementation, according to the gradient material theory, preparing a preset sheet sample through the procedures of controlling the component proportion of the copper-based composite material, performing a wet ball milling process, performing ultrasonic-assisted processing on the preset sheet, performing vacuum drying and demolding and the like; and then preparing the preset sheet sample into the graphene/copper-based gradient functional composite coating through a multi-channel and multi-layer processing mode under the action of a composite energy field based on an ultrasonic-assisted laser micro-cladding process. According to the method, the high-quality gradient functional composite coating can be formed in a metallurgical bonding mode through the laser micro-cladding technology.