Bonding and positioning method applied to precision machining of strip glass mirror in asymmetric structure

Abstract

The invention discloses a bonding and positioning method applied to the precision machining of a strip glass mirror in an asymmetric structure. The bonding and positioning method comprises the following steps: (1) determining a structure of a fixing tool according to the structure of a strip glass part in an asymmetric structure to be machined; (2) establishing an ultraclean workshop and a 0-level marble precision working table; (3) on the marble precision working table, allowing an operator to wear gloves and wipe a machined part by using optical glass wiping cloth dipped with ethyl alcohol; (4) putting the part to be machined on the fixing tool for measuring; (5) fixing the machined part on the fixing tool by using adhesive; (6) detecting the bonding precision of the part to be machined; (7) machining the strip glass part in the asymmetric structure; and (8) separating the machined part. By virtue of the bonding and positioning method, the machining problem of the strip glass part in the asymmetric structure is effectively solved, the positioning precision of the precision machining of a strip mirror of a stepper projection photo-etching machine is improved, and the machined strip mirror meets the requirement of the stepper projection photo-etching machine on high quality.

Description

technical field [0001] The present invention relates to the technical field of precision machining of long strip glass mirrors with asymmetric structure, in particular to a bonding and positioning method for precise machining of strip glass mirrors with asymmetric structure and corner mirrors in a step-by-step projection lithography machine. The mirror is mainly used for The alignment of the step projection lithography machine directly affects the automatic position alignment of the grating in the step projection lithography machine. Background technique [0002] In the precision machining of traditional glass mirrors, hot glue and cold glue are usually used for fixing. Due to the thermal expansion and deformation of glass materials, it is very difficult to control the deformation accuracy when hot glue is used to fix asymmetrical long glass mirrors; The internal stress in the process is relatively large. If the control is not good, it will cause the deformation of the bonde...

AI Technical Summary

Problems solved by technology

[0002] In the precision machining of traditional glass mirrors, hot glue and cold glue are usually used for fixing. Due to the thermal expansion and deformation of glass materials, it is very difficult to control the deformation accuracy when hot glue is used to fix asymmetrical long glass mirrors; The internal stress in the process is relatively large. If the control is not good, it will cause the deformation of the bonded parts, directly reduce the processing accuracy of the parts, and seriously reduce the product qualification rate.

[0003] The long glass mirror of the step projection lithography machine is designed as an asymmetrical slender structure in order to reduce the mass (see figure 1 and figure 2 ) Datum surface shape requirement is 0.005mm, surface roughness is better than Ra=0.2μm. The traditional bonding method cannot meet the accuracy requirement. Therefore, strict process control is required in the part bonding process to achieve the ideal processing accuracy.

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