Method for contacting a semiconductor substrate, more particularly for contacting solar cells, and solar cells contacted thereby
A technology for solar cells and semiconductors, applied in semiconductor devices, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as the complexity of the electroplating cladding method, and achieve significant energy savings, low contact resistance, and low line resistance.
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[0056] exist figure 1 A cross-section of a silicon solar cell is shown, indicated generally at 10 . The solar cell 10 has an emitter 12 (n-type) on its front side, followed by a base layer 14 (p-type), onto which a rear contact 16 made of aluminum is applied planarly. Optionally covered is the rear contact 16 with a passivation layer 23 of amorphous silicon.
[0057] On the front side, a passivation layer, which may consist of silicon nitride, for example, is situated on the emitter 12 . At selected locations, the passivation layer 18 is penetrated by the LIFT process (as will be explained further below) to produce a seed structure 20 which is formed as a very thin intermediate layer and directly contacts the emitter 12 . A thickening layer in the form of a thickening layer 22 of copper alloy is applied thereon. In this way, the front contact 19 is formed on the front side of the solar cell 10 by the combination of the germ structure 20 and the thickening layer 22 . An H-s...
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