Micro-flow control device of multilayer hole plate structure
A control device and plate structure technology, applied in the direction of flow control, non-electric variable control, control/regulation system, etc., can solve the problems of sensitivity to excess objects, inability to apply to spacecraft electric propulsion systems, and inability to achieve mechanical processing.
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[0019] Below in conjunction with accompanying drawing, the present invention is described in detail, as figure 1 As shown, a multi-layer orifice plate structure micro-flow control device of the present invention includes a joint assembly 1, an orifice plate 2 and an end cover plate 3; as figure 2 As shown, the orifice plate 2 adopts a stainless steel plate in the shape of a disc, and a number of small holes are processed on the surface of the disc by laser drilling. The diameter of the small holes is 50 μm to 100 μm, and the deviation is ±0.2 μm; The channel is formed by eclipse, such as image 3 As shown, the end cover plate 3 is also processed into a disc shape with the same outer diameter as the orifice plate 2 by a stainless steel plate, and a small hole is punched in the center, and the two end cover plates 3 are welded on both sides of the disc of the orifice plate 2 by diffusion welding. , the central hole of the end cover plate 3 communicates with the small hole loca...
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