Reversed-polarity AlGaInP-based light-emitting diode and manufacturing method thereof

A technology of light-emitting diodes and manufacturing methods, which is applied in the field of optoelectronics, can solve problems affecting product quality and genuine product rate, poor metal layer adhesion, device voltage increase, etc., to improve quality and yield, improve adhesion and integrity, The effect of the integrity of the electrode structure
CN104167477AActive Publication Date: 2014-11-26YANGZHOU CHANGELIGHT
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
YANGZHOU CHANGELIGHT
Publication Date
2014-11-26

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Abstract

The invention discloses a reversed-polarity AlGaInP-based light-emitting diode and a manufacturing method thereof and belongs to the technical field of photoelectron. The method includes the following steps: firstly manufacturing a light-emitting-diode epitaxial wafer and manufacturing a holophote structure layer on the epitaxial wafer; bonding the epitaxial wafer provided with the holophote structure layer and a permanent substrate through a metal bonding layer; coarsening the surface of a first coarsening layer through removal of a temporary substrate, a buffer layer, a barrier layer and an n-type gallium arsenide layer; manufacturing patterned extending electrodes on the first coarsening layer and the n-type gallium arsenide ohmic contact layer; using a mask to protect existing patterned extending electrodes and removing the first coarsening layer and the n-type gallium arsenide ohmic contact layer, which are outside a mask protective layer and coarsening a second coarsening layer; and forming a main electrode on the second coarsening layer. The method uses a coarsening epitaxial layer structure and mask protection to improve adhesiveness and integrity of the electrodes and the epitaxial layer so that work voltage stability of a light-emitting device is ensured and product quality and yield are improved significantly.
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Description

technical field

[0001] The invention belongs to the technical field of optoelectronics, in particular to the manufacturing technology of reverse-polarity AlGaInP-based light-emitting diodes. Background technique

[0002] High-brightness AlGaInP light-emitting diodes have been widely used in the field of high-efficiency solid-state lighting, such as display screens, automotive lights, backlight sources, traffic lights, landscape lighting, etc. Since the forbidden band width of the conventional GaAs substrate is narrower than that of AlGaInP, the photons emitted downward generated by the active region will be absorbed, resulting in a significant reduction in luminous efficiency. In order to prevent photons emitted downward from being absorbed and improve luminous efficiency, a GaP substrate with a wider bandgap than AlGaInP can be used to replace the GaAs substrate, but this process technology has the disadvantages of complex equipment, low yield, and high manufacturing cost. ...

Claims

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