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Gas management method for prolonging life of laser working gas of excimer laser

A technology of excimer laser and working gas, which is applied in the field of excimer laser, can solve the problem of not being able to effectively control the accumulation of impurities in the laser cavity for a long time, and achieve the effect of prolonging the working life and improving the use efficiency

Active Publication Date: 2015-02-04
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

The disadvantage of this method is that it cannot effectively control the accumulation of impurities in the laser cavity for a long time, and the working life of the laser gas can reach one billion laser pulses

Method used

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  • Gas management method for prolonging life of laser working gas of excimer laser
  • Gas management method for prolonging life of laser working gas of excimer laser
  • Gas management method for prolonging life of laser working gas of excimer laser

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Embodiment Construction

[0014] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0015] Such as figure 1 As shown, the operating voltage of the excimer laser in the constant pulse energy output mode increases gradually with the increase of the number of operating pulses. When the operating voltage is changed from V 0 rise to V 1 , the laser cavity F 2 Gas consumption is △F' 1 , the impurity content is C 1 . Impurities in the laser cavity are the F consumed in the laser cavity 2 Gas reacts with other substances to form, and the impurity content is C 1 with F 2 Gas consumption △F' 1 Proportional. At this time, the laser cavity F 2 Gas content F' 1 and impurity content C 1 Can be expressed as:

[0016] F' 1 =F' 0 -△F' 1 (1)

[0017] C 1 =κ·ΔF' (2)

[0018] Among them, F' 0 F in the laser cavity 2 The initial gas content, κ is the proportional coefficient.

[0019] Perform the first partial gas exchange ...

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Abstract

The invention provides a gas management method for prolonging life of laser working gas of an excimer laser. During working of the excimer laser, since the content of halogen gas in a laser cavity is reduced and the impurity content is increased, the pulse energy output by the laser reduces continuously. Through a mode of partially replacing laser working gas in the laser cavity, the halogen gas consumed in the laser cavity can be effectively replenished, and meanwhile the accumulation of impurities is stopped. According to the gas management method, by analyzing the change of the contents of the halogen gas and the impurities in the laser cavity before and after partial gas replacement, the dosage for partial gas replacement and the injection dosage of the halogen gas are controlled, so that the contents of the halogen gas and the impurities in the laser cavity after every partial gas replacement are kept unchanged, and the excimer laser working in a constant pulse energy output mode is maintained to continuously work within a certain working voltage change range or the excimer laser working in a constant working voltage mode is maintained to continuously work within a certain pulse energy change range. The life of the working gas of the excimer laser can be effectively prolonged, and the working efficiency of the excimer laser is improved.

Description

technical field [0001] The invention belongs to the technical field of excimer lasers, in particular to a gas management method for prolonging the service life of the laser working gas of an excimer laser. Background technique [0002] Excimer lasers are widely used in the fields of industry, medical treatment and scientific research, especially in the field of semiconductor lithography. As a light source for lithography, excimer lasers are key equipment for lithography systems. At present, the laser light sources used in semiconductor lithography equipment are mainly ArF (193nm) and KrF (248nm) excimer lasers. Excimer lasers used in lithography have gas lifetime problems. With the increase of the number of working pulses, the output pulse energy of excimer lasers working in constant voltage mode continues to decrease, and the working voltage of excimer lasers working in constant pulse energy output mode gradually increases. , the main reason is that the fluorine gas in the...

Claims

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Application Information

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IPC IPC(8): H01S3/036
Inventor 李斌成王强韩艳玲
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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