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Temperature rise and fall control method in rapid temperature rise treatment process

A technology of processing process and control method, applied in semiconductor/solid-state device manufacturing, photovoltaic power generation, electrical components, etc., can solve the problem of uncontrollable cooling process, achieve the effect of enriching the range of temperature control, simple implementation, and no cost

Inactive Publication Date: 2015-03-25
SUZHOU RUISHENG SOLAR ENERGY TECH
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  • Abstract
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Problems solved by technology

However, the existing RTP equipment cannot control the cooling process, and there is only one natural cooling method to cool down

Method used

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  • Temperature rise and fall control method in rapid temperature rise treatment process
  • Temperature rise and fall control method in rapid temperature rise treatment process
  • Temperature rise and fall control method in rapid temperature rise treatment process

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Embodiment Construction

[0019] 1 The purpose and execution method of the present invention will be introduced in detail below in conjunction with the accompanying drawings and examples. It is intended to deepen the understanding of the present invention. The following examples should not be regarded as all of the temperature control method of the present invention or as limitations and limitations on the temperature control method technology of the present invention.

[0020] 2 In this work, the RTP heat treatment process device is used in the cooling process, and the heating chamber is cooled by air cooling. Due to the non-adjustability of air cooling, the only cooling method for the sample and the device itself is determined-natural cooling. Because of this, the optimization work of the heat treatment process is limited. To solve this problem, the invention utilizes the combination of controlling the irradiation of the tungsten-halogen lamp and the cooling of the device system itself to complete ...

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Abstract

The invention discloses a temperature rise and fall control method in the rapid temperature rise thermal treatment process of Cu, In, Ga and Se solar cell sample pieces and a setting method of temperature rise and fall control and belongs to the field of conductor material thermal treatment manufacturing technologies. The speed of temperature rise and fall of a vacuum heating chamber is controlled by controlling the power-on / off time of a halogen tungsten lamp (in other words, the temperature rise time, the temperature fall time and the temperature maintaining duration are controlled by setting a program). Through the method, the limit that the temperature rise in the RTP is controllable while control over the temperature fall process is simplex is broken through, and the temperature rise and fall control method is a diversified thermal treatment process capable of simply achieving temperature rise and slow temperature fall.

Description

technical field [0001] The invention belongs to the technical field of heat treatment and manufacture of semiconductor materials. The invention relates to a method for temperature rise and temperature control of a rapid thermal process (Rapid thermal process, RTP) process, especially a method for controlling and setting a temperature drop rate of a low-speed cooling process. Background technique [0002] 1 In the semiconductor manufacturing process, oxidation, nitridation and annealing heat treatment processes (ion implantation, doping, diffusion), often use the RTP rapid heat treatment method. This is mainly due to the advantages of RTP equipment for accurate temperature control during heat treatment, fast heating, and low heat consumption. [0003] 2 CIGS thin-film solar cells have the characteristics of high efficiency, low cost, light weight, easy installation, and environmental protection. They are one of the most promising green energy supply materials in this century...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/324H01L21/67
CPCH01L31/1864Y02E10/50
Inventor 冯宗宝谢承智钱磊
Owner SUZHOU RUISHENG SOLAR ENERGY TECH
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