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Scanning type metal surface imaging and component analyzing device

A metal surface and component analysis technology, which is applied in the direction of measuring devices, analyzing materials, and using wave/particle radiation for material analysis, etc., to achieve reasonable structure design and improve analysis accuracy.

Active Publication Date: 2015-04-01
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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Problems solved by technology

In the prior art, the technology for simultaneous elemental analysis and imaging research is still a problem worthy of research

Method used

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  • Scanning type metal surface imaging and component analyzing device

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Embodiment Construction

[0026] The technical solutions of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0027] refer to figure 1 , in the scanning metal surface imaging and component analysis device of the present invention, X-ray tube 1 generates incident X-rays, and its energy is determined by high-voltage control system 6; X-ray tube 1, X fluorescence probe 2, collimator 3, position sensitive The photomultiplier tube 4 , the detector package 5 , and the laser range finder 13 are all arranged in the shielding body 16 and above the sample stage 15 . The X-ray tube 1 and the X-fluorescent probe 2 are reflectively arranged, the laser rangefinder 13 is arranged directly above the sample 17, and the X-ray tube 1 and the X-fluorescent probe 2 are symmetrically arranged on both sides of the laser rangefinder 13 respectively. The angle α between the surface normal of tube 1 and sample 17 is 67.5°, the angle β betwe...

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Abstract

The invention discloses a scanning type metal surface imaging and component analyzing device. The scanning type metal surface imaging and component analyzing device comprises an X-ray tube (1), an X fluorescent probe (2), a collimator (3), a position sensitive type photomultiplier (4), a detector packaging sleeve (5), a high-pressure control system (6), an amplifier (7), a signal reading-out system (8), a data processing system (9), a computer control and data display system (10), a stepping motor control system (11), a remote logging-in system (12), a laser distance meter (13), a stepping motor (14), a sample platform (15) and a shielding protection body (16). According to the scanning type metal surface imaging and component analyzing device, X rays are generated by using the X-ray tube and characteristic X rays are generated by a reaction between the X rays and nuclide inner shell layer electrons on a metal surface; and a sensor is used for collecting space and energy information of the characteristic X rays and carrying out component analysis and imaging on the metal surface. The scanning type metal surface imaging and component analyzing device is not influenced by varieties of metal plating layers and can simultaneously realize metal surface imaging and element component analysis.

Description

technical field [0001] The invention belongs to the technical field of metal surface composition detection and surface imaging, and relates to a metal surface imaging and composition analysis device, in particular to a scanning metal surface imaging and composition analysis device. Background technique [0002] The surface state of metals has an extremely important influence on the properties of metal materials. For example, the oxidation and corrosion, strength and toughness and fracture behavior of materials are closely related to the chemical composition and structure on the surface layer. Therefore, to understand the properties of metal materials, it is necessary to understand the phenomena on the surface of the material. [0003] At present, nuclear analysis technology has been used as a routine technology in various measurement and analysis. X-ray fluorescence analysis (XRF) is a non-destructive technique for quantifying the elemental composition of solid and liquid ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/223
Inventor 单卿张新磊贾文宝
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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