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Method for manufacturing micro channel by combining laser polarization selective ablation with acid etching

A selective, micro-channel technology, applied in the field of femtosecond laser applications, can solve the problems of low processing efficiency and other products, and achieve the effects of controllable processing degree, considerable processing shape and improved processing accuracy

Inactive Publication Date: 2015-05-20
EPHOTON
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Problems solved by technology

[0004] The purpose of the present invention is to propose a method for preparing microchannels by laser polarization selective ablation combined with acid etching in order to solve the problems of low processing efficiency and defects in processed products in the prior art

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  • Method for manufacturing micro channel by combining laser polarization selective ablation with acid etching
  • Method for manufacturing micro channel by combining laser polarization selective ablation with acid etching

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Embodiment Construction

[0026] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0027] The method for preparing microchannels by using laser polarization selective ablation combined with acid etching, the specific steps are as follows:

[0028] Step 1. Laser modification of quartz glass by adjusting the polarization angle at intervals of 5 degrees

[0029] Step 2: Etch with a hydrofluoric acid solution with a concentration of 8%, process a microchannel structure, and then obtain the corresponding polarization angle when the processing efficiency is the highest

[0030] Step 3: Modify the material with a laser at the polarization angle corresponding to the highest processing efficiency obtained in step 2

[0031] Step 4, acid etching with a hydrofluoric acid solution with a concentration of 8%, so as to obtain a material with microchannels

[0032] The processing flow of the embodiment of the present invention is as figure 1 show...

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Abstract

The invention relates to a method for efficiently manufacturing a micro channel by combining femtosecond laser polarization selective ablation with chemical acid etching, and belongs to the technical field of femtosecond laser application. For the characteristics of crystalline state materials, the partial instant electronic dynamic state in the mutual action process of laser and the materials is adjusted by adjusting the laser polarization parameter and the included angle of the material crystal axis, materials in the laser machining area are triggered to be modified, and the machining efficiency and accuracy of the micro channel are improved with the assistance of chemical acid etching. The method is simple and efficient and has important study significance in the field of micro fluid machining.

Description

technical field [0001] The invention relates to a method for preparing microchannels by using laser polarization selective ablation combined with acid etching, and belongs to the technical field of femtosecond laser applications. Background technique [0002] Microchannels have a wide range of applications in the field of microfluidic devices. Quartz crystal has high application value as an ideal substrate material because of its good optical properties. [0003] Compared with traditional lasers, femtosecond lasers are widely used in material processing as a processing method with ultra-short pulse time, extremely high peak power, and the ability to break through the optical diffraction limit. The ultra-short pulse width of the femtosecond laser can reduce the heat-affected zone during processing, making the processing accuracy higher. In addition, the ultra-high peak power of the femtosecond laser can induce nonlinear absorption of transparent materials. Therefore, based o...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/53B23K26/0622B23K26/70
CPCB23K26/53
Inventor 姜澜冯品李欣戎文龙
Owner EPHOTON
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