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Preparation method of Ag-SiO2-Ag nanosphere array

An ag-sio2-ag and nanosphere technology, which is applied in the field of nanomaterial preparation and Raman spectroscopy detection application, can solve the problems that core-shell nanoparticles are difficult to uniformly disperse, SiO2 is difficult, and the substrate is not firmly bonded. The effect of enhancing sensitivity and improving light permeability

Inactive Publication Date: 2015-06-10
SOUTH CHINA NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
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AI Technical Summary

Problems solved by technology

The existing method is to use "wet-methods" to synthesize SiO on the surface of metal nanoparticles. 2 Thin film, this method prepares SiO with uniform thickness and controllable thickness, but synthesizes less than 5 nanometers 2 still difficult
At the same time, the synthesized core-shell nanoparticles are difficult to disperse uniformly on the solid substrate, and the combination with the substrate is not strong

Method used

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  • Preparation method of Ag-SiO2-Ag nanosphere array
  • Preparation method of Ag-SiO2-Ag nanosphere array
  • Preparation method of Ag-SiO2-Ag nanosphere array

Examples

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preparation example Construction

[0032] Such as figure 1 Shown is an Ag-SiO 2 -Flow chart of the preparation method of Ag nanosphere array, the method includes:

[0033] 101. A layer of silver film is thermally evaporated on the surface of a single crystal silicon sample silicon wafer;

[0034] 102. Put a single crystal silicon sample into a chemical vapor deposition reaction chamber and heat it to a preset temperature, so that the silver film is dehumidified in a solid state to form silver nanoparticles;

[0035] 103. Pass the reaction gas silane at the preset temperature, so that a very thin silicon nano film is uniformly deposited on the surface of the silver nano particles to obtain an Ag-Si core-shell nanosphere array structure;

[0036] 104. Take out the single crystal silicon sample and place it in an oxygen atmosphere and heat it to oxidize the Si nanoshell to SiO 2 ;

[0037] 105. Re-evaporate a silver film with a preset thickness on the surface of the sample to form Ag-SiO 2 -Ag core-shell nanosphere array st...

Embodiment 1

[0057] This embodiment provides a method for preparing a surface Raman enhanced active substrate based on chemical vapor deposition. The preparation process is as follows: figure 2 As shown, (a) a layer of Ag film is thermally evaporated on a smooth silicon substrate, (b) is heated and annealed in a CVD reaction chamber, so that Ag nanoparticles are formed on the surface of the silicon substrate, and (c) a reaction chamber is introduced Gas to obtain the Ag-Si core-shell nanosphere array, (d) take the sample out and place it in an oxygen atmosphere and heat it to obtain Ag-SiO 2 Core-shell nanosphere array, (e) a layer of Ag film is thermally evaporated to obtain Ag-SiO 2 -Ag core-shell nanosphere array SERS substrate, (f) the substance to be detected is adsorbed on the SERS substrate for Raman detection.

[0058] The technical scheme of the present invention will be further explained below.

[0059] Pre-treatment: ultrasonic cleaning 2.5cm×5cm silicon wafer according to the steps ...

Embodiment 2

[0066] This embodiment provides a method for preparing a surface Raman enhanced active substrate based on chemical vapor deposition. The preparation process is as follows: figure 2 As shown, (a) a layer of Ag film is thermally evaporated on a smooth silicon substrate, (b) is heated and annealed in a CVD reaction chamber, so that Ag nanoparticles are formed on the surface of the silicon substrate, and (c) a reaction chamber is introduced Gas to obtain the Ag-Si core-shell nanosphere array, (d) take the sample out and place it in clean air for heating and oxidation to obtain Ag-SiO 2 Core-shell nanosphere array, (e) A layer of Au film is thermally evaporated to obtain Ag-SiO 2 -SERS substrate of Au core-shell nanosphere array, (f) the substance to be detected is adsorbed on the SERS substrate for Raman detection.

[0067] The technical scheme of the present invention will be further explained below.

[0068] Pre-treatment: ultrasonic cleaning 2.5cm×5cm silicon wafer according to the ...

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Abstract

The invention provides a preparation method of an Ag-SiO2-Ag nanosphere array. The method comprises the following steps: forming a layer of Ag thin film on the surface of a monocrystalline silicon sample wafer by virtue of thermal vacuum evaporation; putting the monocrystalline silicon sample into a chemical vapor deposition reaction chamber for heating to a preset temperature, so that the Ag thin film is dehumidified in a solid state and formed into Ag nanoparticles; introducing a reactant gas silane at the preset temperature so that a layer of extremely thin silicon nano-film can be evenly deposited on the surface of the Ag nanoparticles, thereby obtaining an Ag-Si core-shell nanosphere array structure; next, taking out the monocrystalline silicon sample and putting into an oxygen atmosphere for heating so that the Si nano-shell can be oxidized into SiO2; further performing thermal vacuum evaporation to form an Ag thin film with a preset thickness on the surface of the sample, thereby forming the Ag-SiO2-Ag core-shell nanosphere array structure which can be taken as a surface-enhanced Raman scattering (SERS) substrate. The invention aims at providing a technical scheme of the preparation method of the Ag-SiO2-Ag nanosphere array having the SERS effect.

Description

Technical field [0001] The invention relates to the application field of nano material preparation and Raman spectroscopy detection, in particular to an Ag-SiO 2 -Preparation method of Ag nanosphere array. Background technique [0002] Raman scattering spectroscopy has become a powerful molecular detection technique due to its specificity to the vibration peaks of molecules and chemical bonds. Surface Enhanced Raman Scattering (SERS) is widely used in surface research, biological surface science, food safety and other fields because of its high sensitivity and rapid detection. It can obtain structural information that is not easily obtained by conventional Raman spectroscopy. The SERS effect mainly exists in the gaps between metal nanostructures, that is, "hot spots". Due to the plasmon resonance effect on the metal surface, the electromagnetic field near the "hot spots" is greatly enhanced. Recent studies have shown that "hot spots" greatly enhance the SERS signal, have high se...

Claims

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Application Information

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IPC IPC(8): C04B41/52
Inventor 张璋刘利伟高兴森
Owner SOUTH CHINA NORMAL UNIVERSITY
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