Nanopore sequencing method for nucleic acid molecules with low perforation rate and special nanopore device thereof
A technology of nanopore sequencing and low perforation speed, applied in biochemical equipment and methods, determination/inspection of microorganisms, bioreactors/fermenters for specific purposes, etc. DNA perforation blocks the current value amplitude decrease, and the difficulty of accurately measuring the signal increases, so as to achieve the effect of simple and easy experiment, significant deceleration effect, and improved time resolution.
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[0036] Example 1. Method for reducing the perforation speed of nucleic acid molecules in the nanopore sequencing method
[0037] 1. Preparation of chip devices
[0038] A high-energy convergent electron beam in a transmission electron microscope is used to drill holes in the suspended film of the device to prepare a chip device. This includes a series of micro-nano processing technology involved in traditional semiconductor processing technology, and also involves a series of modern cutting-edge nano-scale processing technology.
[0039] The specific method is as follows: First, a 4-inch silicon wafer with a (100) surface is grown with 2 microns of silicon oxide on both sides, and low-stress silicon nitride of about 150 to 200 nanometers is deposited by a low-pressure chemical vapor deposition method. Then make a photolithographic mask, the purpose is to make a lot of 3mm×3mm small substrate periodic distribution on the 4-inch silicon wafer, and each 3mm×3mm small substrate p...
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