Method for carrying out deceleration and monomolecular capture on nucleic acid molecule based on solid-state nano hole
A nucleic acid molecule and nanopore technology, which is used in material analysis by electromagnetic means, chemical instruments and methods, biochemical equipment and methods, etc. Time resolution, effect of increased residence time, high current signal-to-noise ratio
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[0040] 1) Preparation of chip devices
[0041] The purpose of this step is to prepare a solid-state nanoporous device that can be operated in a transmission electron microscope, so that the high-energy convergent electron beam in the transmission electron microscope can be used to punch holes in the suspended film of the device, thereby realizing a nanoporous device. This includes a series of micro-nano processing technology involved in traditional semiconductor processing technology, and also involves a series of modern cutting-edge nano-scale processing technology.
[0042] The specific method is as follows: First, a 4-inch silicon wafer with a (100) surface is grown with 2 microns of silicon oxide on both sides, and low-stress silicon nitride of about 150 to 200 nanometers is deposited by a low-pressure chemical vapor deposition method. Then make a photolithography mask, the purpose is to make a lot of 3mm×3mm small substrate periodic distribution on a 4-inch silicon wafer ...
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