Heterojunction solar cell and preparation method thereof

Abstract

The invention relates to the solar photovoltaic technical field, and discloses a heterojunction solar cell and a preparation method thereof. The heterojunction solar cell and the preparation method are used for reducing the bombardment force exerted on amorphous silicon thin films when sedimentation transparent electric conduction oxide thin film layers are sputtered, increasing the open-circuit voltage and the short-circuit current density of the heterojunction solar cell, and improving the production efficiency. The preparation method of the heterojunction solar cell includes the steps of forming the first transparent electric conduction oxide thin film layers on an amorphous silicon layer of the first electric conduction type and an amorphous silicon layer of the second electric conduction type through the first sputtering method respectively, wherein the energy of sputtering particles in the first sputtering method is lower than that of sputtering particles in a direct-current magnetron sputtering method; forming the corresponding second transparent electric conduction oxide thin film layer on each first transparent electric conduction oxide thin film layer through a second sputtering method, wherein the energy of sputtering particles in the second sputtering method is higher than that of the sputtering particles in the first sputtering method.

Description

technical field [0001] The invention relates to the field of solar photovoltaic technology, in particular to a heterojunction solar cell and a preparation method thereof. Background technique [0002] With the increase of human demand for energy, conventional energy reserves are limited and non-renewable. Therefore, the development of renewable energy, especially solar energy, has attracted more and more attention, and the research and development of solar cells has become more and more extensive. [0003] At present, solar cells can be divided into crystalline silicon solar cells, thin-film solar cells and new solar cells. Among them, crystalline silicon solar cells have excellent electrical and mechanical properties compared with other types of cells. Therefore, crystalline silicon solar cells occupy an important position in the field of photovoltaics. [0004] Silicon heterojunction cells are composed of various film layers, and there are various heterogeneous material i...

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Problems solved by technology

[0005] However, in the process of depositing transparent conductive oxide films by DC magnetron sputtering, the energy of plasma particles is relatively large, generally greater than 50 electron volts and less than or equal to 200 electron volts, which will cause damage to amorphous silicon. Interfacial recombination with transparent conductive oxide films increases, reducing the passivation quality of amorphous silicon, which ultimately leads to a decrease in the short-circuit current density and open-circuit voltage of the battery

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