Method for preparing nano platinum-coated gold particles film composite material
A composite material, gold particle technology, applied in metal material coating process, sputtering plating, ion implantation plating and other directions, can solve the problems of Au particle pollution, difficult particle fixation, complex technology, etc., to achieve low cost, Easy to operate, simple effect
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Embodiment 1
[0031] A preparation method of nano-platinum-coated gold particle film composite material, comprising the following steps:
[0032] (1), polyimide substrate cleaning
[0033] Put the flexible polyimide matrix into a beaker filled with absolute ethanol, put the beaker into an ultrasonic cleaner for ultrasonic cleaning for 10 minutes, and then put the cleaned polyimide into a beaker filled with deionized water. Ultrasonic cleaning in the beaker for 5 minutes, drying the cleaned polyimide substrate with nitrogen, and then fixing the polyimide substrate on the substrate stage of the magnetron sputtering coating machine;
[0034] (2), target preparation and coating machine substrate stage heating
[0035] Place the Au target with a purity of 99.99at% and the Mo target with a purity of 99.99at% respectively on the target position of the coating machine. After placing the target and the polyimide substrate, close the vacuum chamber of the coating machine and turn on the mechanical pum...
Embodiment 2
[0041] A preparation method of nano-platinum-coated gold particle film composite material, comprising the following steps:
[0042] (1), polyimide substrate cleaning
[0043] Put the flexible polyimide matrix into a beaker filled with absolute ethanol, put the beaker into an ultrasonic cleaner for ultrasonic cleaning for 10 minutes, and then put the cleaned polyimide into a beaker filled with deionized water. Ultrasonic cleaning in the beaker for 10 minutes, drying the cleaned polyimide substrate with nitrogen, and then fixing the polyimide substrate on the substrate stage of the magnetron sputtering coating machine;
[0044] (2), target preparation and coating machine substrate stage heating
[0045] Place the Au target with a purity of 99.99at% and the Mo target with a purity of 99.99at% respectively on the target position of the coating machine. After placing the target material and the polyimide substrate, close the vacuum chamber of the coating machine, and turn on the ...
Embodiment 3
[0051] A preparation method of nano-platinum-coated gold particle film composite material, comprising the following steps:
[0052] (1), polyimide substrate cleaning
[0053] Put the flexible polyimide matrix into a beaker filled with absolute ethanol, put the beaker into an ultrasonic cleaner for ultrasonic cleaning for 15 minutes, and then put the cleaned polyimide into a beaker filled with deionized water. Ultrasonic cleaning in the beaker for 15 minutes, drying the cleaned polyimide substrate with nitrogen, and then fixing the polyimide substrate on the substrate stage of the magnetron sputtering coating machine;
[0054] (2), target preparation and coating machine substrate stage heating
[0055] Place the Au target with a purity of 99.99at% and the Mo target with a purity of 99.99at% respectively on the target position of the coating machine. After placing the target material and the polyimide substrate, close the vacuum chamber of the coating machine, and turn on the...
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