Vacuum degree detection method and system based on infrared laser spectrum

A detection method, infrared laser technology, applied in liquid tightness measurement using liquid/vacuum degree, color/spectral characteristic measurement, vacuum gauge, etc., can solve problems such as slow detection speed

Active Publication Date: 2015-08-19
黄山市开发投资集团有限公司
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  • Abstract
  • Description
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Problems solved by technology

This method has high reliability in leak detection, but the detection speed is relatively slow

Method used

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  • Vacuum degree detection method and system based on infrared laser spectrum
  • Vacuum degree detection method and system based on infrared laser spectrum
  • Vacuum degree detection method and system based on infrared laser spectrum

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Embodiment Construction

[0046] see figure 1 with figure 2 , the vacuum degree detection method based on infrared laser spectrum in the present embodiment is to carry out as follows:

[0047] Step a, using a near-infrared semiconductor laser as the detection light source, the output wavelength is periodically and continuously scanned within the set wavelength range through the sawtooth wave signal superimposed on the laser drive current, and the emitted beam of the laser is divided into detection light and reference light, the detection light passes through the vacuum sealed container to be tested to form a detection optical path, and realizes the detection of an isolated water vapor target absorption line in the near-infrared spectral region of the water vapor in the vacuum sealed container to be tested, and obtains the water vapor detection spectral signal D 0 (n); The reference light is input to the fiber optic interferometer as a synchronous interference signal R 0 The reference optical path of...

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Abstract

The invention discloses a vacuum degree detection method and system based on an infrared laser spectrum. By use of the high-resolution absorption line broadening characteristic of adsorption steam released by the headspace of a sealing container, through double-optical-path detection, by use of synchronization interference fringe signals, the time domain of a detection spectrum is converted to a frequency domain, the absolute value of spectral line broadening is obtained, and absolute measurement of a gas pressure intensity is realized; light intensity information is obtained by use of a background fitting algorithm, and the influence of the change of the transmittance of the container on detection is eliminated through normalization processing; rapid fitting is performed on a steam absorption line by use of a composite linear model, and Doppler-broadening and pressure broadening of the spectral line broadening are separated from each other; and through synchronous measurement of steam pressure dividing, the precision of vacuum air pressure measurement is improved. The method and system provided by the invention can be applied to vacuum degree detection of a vacuum sealing container in foodstuff and medical industries and realize rapid leak detection.

Description

technical field [0001] The invention belongs to a laser on-line detection method and system, in particular to an infrared semiconductor laser spectrum measurement method and system for vacuum degree detection and leak detection of vacuum-sealed packaging products in industries such as food and medicine. Background technique [0002] Vacuum-sealed packaging is a common means to prevent long-term storage and deterioration of products. In the food, pharmaceutical and other industries, non-destructive vacuum leak detection for vacuum-sealed packaging of ex-factory products is a mandatory requirement and a necessary process for related products in the country. , Non-destructive vacuum measurement and leak detection are of great significance and wide application requirements in the industrial field. The traditional vacuum degree measuring instrument needs gas path connection, which will cause damage to the sealed packaging, and the detection speed is slow, so it cannot be applied ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L21/00G01M3/34G01N21/39
Inventor 陈东贾兆丽王尹秀张玉钧高彦伟
Owner 黄山市开发投资集团有限公司
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