Realization method for synchronously reading capacitance sensors by multiple board cards

A technology of capacitive sensor and implementation method, which is applied in the direction of instruments, simulators, computer control, etc., can solve the problems of poor control precision of micro-motion stage and inability to guarantee synchronization, and achieve the effect of ensuring synchronization

Inactive Publication Date: 2015-12-09
HARBIN INST OF TECH
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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the prior art reading multi-channel capacitor data cannot guarantee its synchronizati

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  • Realization method for synchronously reading capacitance sensors by multiple board cards
  • Realization method for synchronously reading capacitance sensors by multiple board cards
  • Realization method for synchronously reading capacitance sensors by multiple board cards

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specific Embodiment approach 1

[0017] Specific implementation mode one: the following combination Figure 1 to Figure 5 Describe this embodiment, the implementation method of multi-board cards synchronously reading capacitive sensor described in this embodiment, the reading device that this method involves is: mount synchronous trigger card 3 and n block motion control cards 1 on VME bus 2, The synchronous trigger card 3 sends a synchronous trigger signal to n motion control cards 1 through the VME bus 2, and each motion control card 1 collects and stores the signals of three capacitive sensors 4 at the same time; the synchronous trigger card 3 and the motion control card 1 have the same structure ;

[0018] Motion control card 1 uses DSP module 1-1 as the algorithm processing module, FPGA module 1-2 as the main signal processing module, CPLD chip 1-3 as the level conversion module, and based on the RS422 serial port communication protocol, three Serial port 1-7 and serial port level conversion circuit 1-6...

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Abstract

The invention discloses a realization method for synchronously reading capacitance sensors by multiple board cards, which belongs to the technical field of signal acquisition and data communication in a high-precision motion control system and aims at solving the problem that synchronization can not be ensured and a micropositioner thus has poor control precision when multiple paths of capacitor data are read in the prior art. The method comprises the following steps: 1, when a motion control card receives a rising edge of a synchronous trigger signal, three capacitance sensors send currently-measured data to board cards, the data arrive at pins of an FPGA module via a serial port level conversion circuit and are stored in a two-port RAM, and after data receiving is completed, a receiving completion signal is outputted; and 2, the generated receiving completion signal triggers a DSP module to be interrupted externally, the data stored in the two-port RAM are read to the DSP module in a DSP module interruption program, and the process of reading signals of the multiple paths of capacitance sensors synchronously is completed.

Description

technical field [0001] The invention relates to a method for realizing synchronous reading of capacitive sensors by multiple boards, and belongs to the technical field of signal acquisition and data communication of a high-precision motion control system. Background technique [0002] Nowadays, electronic equipment has entered thousands of households, and more and more tends to be miniaturized and miniaturized. This requires the machine for manufacturing electronic chips - the lithography machine to achieve higher precision. It is a common standard that the machine needs to meet. To achieve such a high control accuracy, ultra-high-precision sensors and better control algorithms are essential. At the same time, the synchronization and real-time performance of the data collected by the entire system is also particularly important. For example, the micro-movement stage of the mask table carrying the silicon wafer will carry the silicon wafer and move with nanometer precision, s...

Claims

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Application Information

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IPC IPC(8): G05B19/042
CPCG05B19/0421G05B2219/1208
Inventor 陈兴林刘洋宋法质王一光陈震宇何良辰宋跃张常江万勇利韩记晓赵为志
Owner HARBIN INST OF TECH
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