Realization method for synchronously reading capacitance sensors by multiple board cards

Abstract

The invention discloses a realization method for synchronously reading capacitance sensors by multiple board cards, which belongs to the technical field of signal acquisition and data communication in a high-precision motion control system and aims at solving the problem that synchronization can not be ensured and a micropositioner thus has poor control precision when multiple paths of capacitor data are read in the prior art. The method comprises the following steps: 1, when a motion control card receives a rising edge of a synchronous trigger signal, three capacitance sensors send currently-measured data to board cards, the data arrive at pins of an FPGA module via a serial port level conversion circuit and are stored in a two-port RAM, and after data receiving is completed, a receiving completion signal is outputted; and 2, the generated receiving completion signal triggers a DSP module to be interrupted externally, the data stored in the two-port RAM are read to the DSP module in a DSP module interruption program, and the process of reading signals of the multiple paths of capacitance sensors synchronously is completed.

Description

technical field [0001] The invention relates to a method for realizing synchronous reading of capacitive sensors by multiple boards, and belongs to the technical field of signal acquisition and data communication of a high-precision motion control system. Background technique [0002] Nowadays, electronic equipment has entered thousands of households, and more and more tends to be miniaturized and miniaturized. This requires the machine for manufacturing electronic chips - the lithography machine to achieve higher precision. It is a common standard that the machine needs to meet. To achieve such a high control accuracy, ultra-high-precision sensors and better control algorithms are essential. At the same time, the synchronization and real-time performance of the data collected by the entire system is also particularly important. For example, the micro-movement stage of the mask table carrying the silicon wafer will carry the silicon wafer and move with nanometer precision, s...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the prior art reading multi-channel capacitor data cannot guarantee its synchronization, which leads to poor control precision of the micro-motion table, and provides a method for realizing multi-board synchronous reading of capacitive sensors

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