Silicon-based OLED display pixel preparation method
A display pixel and silicon-based technology, applied in semiconductor/solid-state device manufacturing, electrical components, electric solid-state devices, etc., can solve the problems of insufficient dimensional accuracy and positioning accuracy of RGB pixel areas, unreasonable color mixing ratio, and color distortion of display images, etc. , to achieve normal image color, reduce sheet resistance, and improve performance
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[0033] Such as figure 1 As shown, this embodiment provides a method for manufacturing a silicon-based OLED display pixel, which includes a pixel backplane process and an organic light-emitting layer process, wherein the pixel backplane process includes:
[0034] (1) Metal electrode layer coating is carried out on the monocrystalline silicon substrate, and the substrate pretreatment is carried out before the coating: the monocrystalline silicon substrate is ultrasonically cleaned with deionized water for 2 minutes at 80 ° C in an ultrasonic cleaning device, and then The substrate was rinsed with deionized water at a speed of 1500rpm / min for 1min, and then dried at a high speed of 2500rpm for 1min after cleaning, then put into a nitrogen protection oven and baked for 3min. Using magnetron sputtering coating equipment, Ti / Al / Pt three-layer metal stacked electrodes were fabricated sequentially, with thicknesses of and The coating rate is and Obtain a metal electrode layer;...
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