A magnetic multilayer film with antiferromagnetic interlayer coupling and its preparation method
An antiferromagnetic layer and multi-layer film technology, which is applied in the field of magnetic multi-layer films with anti-ferromagnetic interlayer coupling and its preparation, can solve the problems such as failure of breakthroughs in magnetic multi-layer films, and achieve simplified structure, Good effect of epitaxial growth
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[0046] The present invention also provides a method for preparing a magnetic multilayer film with antiferromagnetic interlayer coupling, comprising:
[0047] sequentially depositing a barrier layer and a magnetic layer on the substrate, and repeatedly depositing the barrier layer and the magnetic layer to obtain a deposited magnetic multilayer film;
[0048] Wherein, the barrier material of the barrier layer is CaRu 0.5 Ti 0.5 o 3 ;
[0049] The number of layers of the barrier layer is N, N≥3;
[0050] The ferromagnetic material of the ferromagnetic layer is a perovskite transition metal oxide,
[0051] The number of layers of the magnetic layer is N-1;
[0052] The deposited magnetic multilayer film is annealed to obtain a magnetic multilayer film with antiferromagnetic interlayer coupling.
[0053] According to the present invention, a barrier layer and a magnetic layer are sequentially deposited on the substrate, and the barrier layer and the magnetic layer are deposi...
Embodiment 1
[0064] Preparation of [CaRu 0.5 Ti 0.5 o 3 (1.2nm) / La 0.67 Ca 0.33 MnO 3 (2.8nm)] 10 / CaRu 0.5 Ti 0.5 o 3 (1.2nm), that is, the magnetic multilayer film with N=11 antiferromagnetic interlayer coupling
[0065] 1) Preparation of La 0.67 Ca 0.33 MnO 3 Ferromagnetic material: CaO (99.99% pure), MnO 2 (purity ≥ 98.0%) and La 2 o 3 (purity 99.99%) powder according to La 0.67 Ca 0.33 MnO 3 The chemical molar ratio of Ca element, Mn element and La element is mixed, after grinding evenly, it is pre-fired three times at 1100°C, 1200°C, 1300°C respectively, each time for 12 hours, and then pressed under 40MPa pressure. Circular target, and calcined at 1350°C for 24 hours, sintered into La 0.67 Ca 0.33 MnO 3 target, ie La 0.67 Ca 0.33 MnO 3 ferromagnetic material.
[0066] 2) Preparation of CaRu 0.5 Ti 0.5 o 3 Barrier material: CaO (99.99% pure), RuO 2 (99.95% pure), TiO 2 (purity 99.99%) powder according to CaRu 0.5 Ti 0.5 o 3 After mixing the chemical mo...
Embodiment 2
[0074] Preparation of [CaRu 0.5 Ti 0.5 o 3 (1.2nm) / La 0.67 Ca 0.33 MnO 3 (2.8nm)] 2 / CaRu 0.5 Ti 0.5 o 3 (1.2nm), that is, the magnetic multilayer film with N=3 antiferromagnetic interlayer coupling
[0075] 1) Preparation of La 0.67 Ca 0.33 MnO 3 Ferromagnetic material: CaO (99.99% pure), MnO 2 (purity ≥ 98.0%) and La 2 o 3 (purity 99.99%) powder according to La 0.67 Ca 0.33 MnO 3 The chemical molar ratio of Ca element, Mn element and La element is mixed in the mixture. After uniform grinding, it is pre-fired three times at 1100°C, 1200°C, and 1300°C. Shaped target, and calcined at 1350 °C for 24 hours, sintered into La 0.67 Ca 0.33 MnO 3 target, ie La 0.67 Ca 0.33 MnO 3 ferromagnetic material.
[0076] 2) Preparation of CaRu 0.5 Ti 0.5 o 3 Barrier material: CaO (99.99% pure), RuO 2 (99.95% pure), TiO 2 (purity 99.99%) powder according to CaRu 0.5 Ti 0.5 o 3 After mixing the chemical molar ratios of the elements Ca, Ru and Ti, they are uniforml...
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