Zr-Ti-B-N nano composite coating and preparation method thereof

A nanocomposite coating, zr-ti-b-n technology, applied in the direction of coating, nanotechnology, nanotechnology, etc., can solve the problems affecting the mechanical properties and tribological behavior of the coating, the loss of high hardness of the coating, and limiting applications , to achieve the effect of eliminating coating defects, improving coating toughness and improving mechanical properties

Active Publication Date: 2020-08-07
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, the presence of impurity O elements in the coating often leads to high hardness loss of the coating, and introduces crystal defects such as dislocations and grain boundaries, which will seriously affect the mechanical properties and tribological behavior of the coating, limiting its application on the tool surface. application

Method used

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  • Zr-Ti-B-N nano composite coating and preparation method thereof
  • Zr-Ti-B-N nano composite coating and preparation method thereof
  • Zr-Ti-B-N nano composite coating and preparation method thereof

Examples

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Embodiment 1

[0036]In this embodiment, a Zr-Ti-B-N coating is deposited on a mirror-polished single-crystal Si wafer ((100) crystal plane), and the size of the substrate is 50mm×10mm×0.7mm. Before coating, the substrate was ultrasonically cleaned in alcohol solution for 20 minutes, then dried with high-purity nitrogen, and placed on the sample holder in the vacuum chamber facing the target. The coating process is carried out on the V-TECH AS610 high-power pulse and pulse DC composite magnetron sputtering coating machine. The coating machine is also equipped with an arc ion plating cathode. The target materials are respectively metal Cr target and compound ZrB 2 target and TiB 2 Targets (all with a purity of wt.99.9%), the former is used for bombardment cleaning and deposition of CrN transition layer on the substrate surface, and the latter is used for deposition of Zr-Ti-B-N coating; the working gas and reaction gas are respectively selected from high-purity Ar (purity 99.999%), N 2 +H ...

Embodiment 2

[0040] In this embodiment, a Zr-Ti-B-N coating is deposited on a mirror-polished YG8 cemented carbide substrate, and the size of the substrate is 30mm×30mm×3mm. The substrate was first ground and polished by metallographic sandpaper, then ultrasonically cleaned with acetone, degreasing agent, ultrapure water and alcohol solution, dried with high-purity nitrogen, and then placed on the sample holder in the vacuum chamber facing the target. The deposition parameters are the same as in Example 1.

[0041] Figure 5 It is the hardness test result of Zr-Ti-B-N coating deposited on the cemented carbide substrate. It can be seen that the fluctuation of the coating hardness test value is small, ranging from 24 to 27GPa, and the average value of ten measurements is 25.4±0.8GPa ( Figure 5 ), the coating hardness is higher. The bonding strength between the coating and the substrate is tested by the scratch method. The tip radius of the diamond scratch head is 200 μm, the normal load ...

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Abstract

The invention discloses a Zr-Ti-B-N nano composite coating and a preparation method thereof, and belongs to the technical field of composite coatings and preparation thereof. The composite coating comprises an amorphous BN phase, a ZrN crystal phase, a TiN crystal phase, a ZrB2 crystal phase and a Ti2N crystal phase, wherein the ZrB2 phase preferentially grows along a (001) crystal face, and the Ti2N phase preferentially grows along a (110) crystal face. The Zr-Ti-B-N nano composite coating is deposited on a substrate by adopting a high-power pulse and pulse direct-current composite magnetronsputtering technology, and a TiB2 target and a ZrB2 target are connected to a high-power pulse magnetron sputtering cathode and a pulse direct-current magnetron sputtering cathode correspondingly; andthe Zr-Ti-B-N coating is deposited in a mixed atmosphere of Ar, N2 and H2. The nano-composite coating has the advantages of higher hardness and elasticity modulus, good wear resistance, the compact organizational structure and strong binding force between the coating and the substrate.

Description

technical field [0001] The invention relates to the technical field of composite coating and its preparation, in particular to a Zr-Ti-B-N nano composite coating and a preparation method thereof. Background technique [0002] In recent years, the use of wear-resistant hard coatings on machinery, forging and forming devices has become more and more important. It can not only improve the oxidation resistance of the tool surface, but also enable the tool to withstand higher cutting temperatures, which is conducive to improving cutting speed and The processing efficiency is improved, and the impact of cutting fluid on the environment is reduced or eliminated, and the application range of dry cutting is expanded. Zr-B-N ternary nanocomposite coating has high toughness, excellent wear resistance and chemical stability, and is expected to be used on the surface of cutting tools, molds and mechanical parts. Doping Ti element into Zr-B-N coating can further strengthen the coating th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/06C23C14/35C23C14/02C23C14/54B82Y30/00
CPCC23C14/325C23C14/352C23C14/3407C23C14/0641C23C14/0647C23C14/067C23C14/0036C23C14/022C23C14/54B82Y30/00
Inventor 王铁钢许人仁郭玉垚阎兵尹照星刘艳梅
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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