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Optical arm amplified high-precision angle sensor and measurement method

A technology of angle sensor and measurement method, which is applied in the direction of measuring devices, instruments, and optical devices, etc., can solve the problems of high price, improvement of circular grating angle measurement accuracy, high requirements for machining accuracy and installation accuracy of mechanical axis, and achieve simple structure, Realize the effect of batch manufacturing and easy batch manufacturing

Active Publication Date: 2018-08-28
张白
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Among the three types of angle sensors, the circular grating has the advantages of good measurement dynamics, strong anti-interference ability, and high angle measurement accuracy. The disadvantage is that it requires high machining accuracy and installation accuracy of the mechanical axis, and its price is relatively high.
However, due to the limitations of the photolithography process, it is difficult to improve the angle measurement accuracy of circular gratings, especially for small radius circular gratings, the angle measurement accuracy cannot be further improved, which has become the key to limit the accuracy of instruments in many precision measuring instruments factor

Method used

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  • Optical arm amplified high-precision angle sensor and measurement method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0054] Such as figure 1 As shown, an optical arm amplified high-precision angle sensor, a laser source 1 is used to emit a laser beam;

[0055] The reflective part 5 is used to be installed on the measured object, the reflective part 5 is rotatable and is provided with at least one reflective surface 6, and the reflective surface 6 is used to reflect the laser beam emitted by the laser source one 1;

[0056] Photodetector one 7, for receiving the laser beam reflected by the reflective surface 6 of the reflective member 5;

[0057] The processing system converts the position change value of the laser beam received by the photodetector one 7 into the rotation angle value of the reflection component 5 .

[0058] Reflecting part 5 selects regular polygon column for use, and its inside is provided with shaft hole, as image 3 As shown, the installation hole 11 of the regular polygonal column realizes coaxial rotation with workpieces such as the measured shaft system when rotating...

Embodiment 2

[0085] Such as Figure 4 , 5 As shown, when a dual optical path is used to realize measurement, a beam splitter 10 is arranged between the above-mentioned laser source 1 and the regular polygonal column, and the laser beam emitted by the laser source 1 reaches the beam splitter 10 and forms a laser beam 1 respectively after being transmitted and reflected. 3. Laser beam two 4, laser beam one 3 is incident on photodetector one 7 after being reflected by the regular polygonal column, laser beam two 4 is incident on at least one reflector 9, and then reflected to photoelectric detector two 8. The laser beam 2 4 reflected by the beam splitter 10 is incident on the photodetector 2 8 after passing through two mirrors 9 in sequence. The first photodetector 7 and the second photodetector 8 are arranged parallel to each other on the same side of the regular polygonal column.

[0086] The laser beam at the laser source one 1 is divided into a laser beam one 3 and a laser beam two 4, s...

Embodiment 3

[0089] Such as Figure 9 As shown, when the photodetector 7 is not in the vertical direction as in Embodiment 1, but forms a certain angle with the horizontal line When the angle of the regular polygonal reflective element is rotated by an angle of γ, it is assumed that the detected position change on the photodetector is L AB′ , can be obtained from formula 4:

[0090]

[0091] when , the photodetector-7 is in a horizontal state, and in this state, the measurement principle is the same as in embodiment 1, and the installation space is greatly reduced under the same distance from the axis of the inner hole to the photodetector; , the photodetector 7 is in a vertical state, as shown in Example 1, under the same distance from the axis of the inner hole to the photodetector, the detection accuracy is higher than When high, but the installation space increases. In actual use, you can choose the appropriate one according to the installation space and precision requirements...

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Abstract

The invention discloses a novel optical arm amplified high-precision angle sensor and a measurement method. The angle sensor comprises a laser source, a reflection component, a photoelectric detector and a processing system, and is characterized in that the laser source is used for emitting a laser beam; the reflection component is used for installing a measured object, the reflection component is rotatable and provided with at least one reflecting plane, and the reflecting plane is used for reflecting the laser beam emitted by the laser source; the photoelectric detector is used for receiving a laser beam reflected by the reflecting plane of the reflection component; and the processing system converts a position variation value of the laser beam received by the photoelectric detector into a rotation angle value of the reflection component. According to the angle sensor disclosed by the invention, the reflection component is installed on the object to be measured, laser shoots to the surface of the reflecting plane of the reflection component and is then reflected to the photoelectric detector, and a corresponding angle variation value is calculated through measuring photosensitive position variations of the photoelectric detector. The sensor disclosed by the invention is simple in structure, applicable to measuring the rotating angle of a small-angle object to be measured, and easy to realize batch production.

Description

technical field [0001] The invention relates to the field of precision testing technology and instruments, in particular to an optical arm amplified high-precision angle sensor and a measuring method. Background technique [0002] Angle sensor is a commonly used geometric quantity sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing and military science. At present, the mainstream angle measuring sensors on the market include photoelectric encoders, resolvers and disc-type inductive synchronizers. [0003] The photoelectric encoder is commonly known as a circular grating, which uses the moiré fringes generated by the circular grating and photoelectric conversion technology to output the angle information in the form of pulses. Compared with other angle measuring sensors, the circular grating has the advantages of small size, light weight, high angle measuring accuracy, fast response, strong anti-interference ability, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/26
Inventor 张白丁子兮
Owner 张白