Self-calibration method for thermal deformation of deformable mirror under high-power continuous laser irradiation
A technology of laser irradiation and deformable mirror, applied in the field of strong laser technology and adaptive optics
Active Publication Date: 2017-06-16
SICHUAN UNIV
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[0010] The purpose of the present invention is to overcome the existing defects and deficiencies in the prior art, and to provide a self-correction method for thermal deformation of deformable mirrors under high-power continuous laser irradiation. , without using heat exchange measures and without changing the structural parameters of the deformable mirror, a set of driver control signals that change with time are used to adjust the thermally deformed surface of the deformable mirror in real time, thereby realizing real-time thermal deformation of the deformable mirror compensate
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[0068] The deformable mirror used in this embodiment is a discrete drive type deformable mirror, and its structure is as follows Figure 4 Shown in middle (a); include the film 8 on the surface of the deformable mirror, the mirror surface 9, the pole head 10, the driver 11 and the base 12; its film film structure is: Sub / (HL) 11 H / Air, where Sub means silicon substrate, H means ZnS film, L means YbF 3 thin film, at a central wavelength λ 0=3.8 μm under normal laser incidence conditions, the film system absorption rate is 109ppm; the diameter of the deformable mirror mirror surface 9 is 180mm, the thickness is 2.5mm, and the material is single crystal silicon; the deformable mirror pole head 10 is a driver 11 The connection unit between the mirror surface 9 is made of monocrystalline silicon, and the diameter of a single pole head is 8 mm, and the length is 10 mm; the driver 11 is the main device for controlling the shape of the deformed mirror surface, and its material is pie...
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The invention relates to a self-correction method for thermal deformation of a deformable mirror under high-power continuous laser irradiation, and belongs to the fields of strong laser technology and adaptive optics technology. This method uses the deformable mirror to correct its thermally deformed surface shape by itself, that is, without using heat exchange measures and without changing the structural parameters of the deformable mirror, a set of driver control signals that vary with time are used to adjust the thermally deformed surface of the deformable mirror in real time. shape, so as to realize real-time compensation for the thermally deformed surface shape of the deformable mirror. The self-correction method of the present invention is suitable for self-correction of thermal deformation of deformable mirrors under different laser parameters and different laser irradiation time conditions, and its correction effect will not deteriorate with the increase of incident laser power and laser irradiation time; the correction method of the present invention Without relying on any other external devices, the self-correction of the thermal deformation of the existing discrete driving deformable mirror can be realized.
Description
technical field [0001] The invention relates to a technology for controlling a deformable mirror to compensate its thermal deformation surface shape, in particular to a self-correction method for thermal deformation of a deformable mirror under high-power continuous laser irradiation, and belongs to the field of strong laser technology and adaptive optics technology. Background technique [0002] With the rapid development of laser technology and the continuous expansion of its application range, how to obtain higher power and high beam quality laser has become a focus of attention and a goal of struggle. However, in a high-power laser system, under continuous laser irradiation, the optical element will form a temperature gradient distribution inside. At the same time, due to the thermal expansion of the optical element material, thermal deformation will occur, and wavefront distortion will be introduced to the incident beam. Although the adaptive optics technology can monit...
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IPC IPC(8): G02B26/06
Inventor 张彬胡小川钟哲强
Owner SICHUAN UNIV