Flexible capacitor type micromachining ultrasonic transducer (CMUT) and preparation method thereof

A technology of capacitive micromachining and ultrasonic transducers, which is applied in the direction of fluid using vibration, can solve the problems of reduced coupling efficiency, inability to detect close contact with the object surface, and inability to make flexible arrays, so as to reduce ultrasonic loss and facilitate large-scale The effect of widening application and overcoming bandwidth limitations

Active Publication Date: 2016-03-23
SOUTH CHINA UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, if silicon single crystal material is used as the substrate, it is impossible to make a flexible array, and it cannot be in close contact with the surface of the detection object, especially the coupling efficiency of the detection object with an uneven surface will be greatly reduced, and there is a large bandwidth limitation.

Method used

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  • Flexible capacitor type micromachining ultrasonic transducer (CMUT) and preparation method thereof
  • Flexible capacitor type micromachining ultrasonic transducer (CMUT) and preparation method thereof
  • Flexible capacitor type micromachining ultrasonic transducer (CMUT) and preparation method thereof

Examples

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Embodiment

[0044] The flexible capacitive micromachining ultrasonic transducer of this embodiment includes a flexible PCB substrate 1, a lower electrode 2, an etching sacrificial layer 3, an organic polymer support layer 4, an organic polymer vibration film 5, and an upper electrode arranged in sequence. 6. The organic polymer supporting layer 4 is provided with a groove 41, and the groove 41 and the organic polymer vibrating film 5 form a cavity of an ultrasonic transducer.

[0045] The groove is a cylindrical groove with a depth of 2.0-4.0 μm and a bottom diameter of 20-200 μm.

[0046] The organic polymer vibrating film has a thickness of 0.5-2.5 μm and is made of rubber or polyvinyl chloride plastic.

[0047] The upper electrode is aluminum film or silver film, and the lower electrode is copper film.

[0048] When the flexible capacitive micromachining ultrasonic transducer is applied, a DC voltage is applied between the upper and lower electrodes, the strong electrostatic field pul...

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Abstract

The invention discloses a flexible capacitor type micromachining ultrasonic transducer (CMUT). The flexible CMUT comprises a flexible substrate, a lower electrode, an etching sacrificial layer, an organic polymer support layer, an organic polymer vibration thin film and an upper electrode which are arranged sequentially. The organic polymer support layer is provided with a groove, and the groove and the organic polymer vibration thin film form a cavity of the ultrasonic transducer. The invention further discloses a preparation method of the flexible CMUT. According to the flexible CMUT, ultrasonic loss caused by poor coupling is effectively reduced, and the flexible ultrasonic transducer is achieved. The flexible CMUT is suitable for detection objects, including animals' epidermal tissue, of any shapes, so that the application range of the CMUT is effectively widened. The preparation method is simple in preparation process and low in cost.

Description

technical field [0001] The invention relates to the field of ultrasonic transducers, in particular to a flexible capacitive micro-processed ultrasonic transducer and a preparation method thereof. Background technique [0002] Ultrasonic transducers and array probes are key components in ultrasonic detection and ultrasonic imaging technology, and are widely used in technical fields such as medical diagnosis and treatment, underwater communication and detection, defect non-destructive testing, ranging and positioning, remote sensing and remote control, etc. The quality of the population, the protection of physical and mental health, the improvement of product quality, the detection of seabed resources, and the maintenance of national security are all of great significance. The traditional piezoelectric ceramic (PZT) ultrasonic transducer has the advantages of high electromechanical conversion efficiency, easy matching with the circuit, stable performance, easy processing and l...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B06B1/02
CPCB06B1/02
Inventor 张丹丹刘玉荣姚若河韦岗
Owner SOUTH CHINA UNIV OF TECH
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