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Combined type graphite electrode-ceramic evaporator boat

A graphite electrode and combined technology, applied in vacuum evaporation plating, ion implantation plating, coating, etc., can solve the problems of uneven corrosion of evaporation boats, splashing of aluminum liquid, burning through substrates, etc., and achieve significant economic and Social benefits, excellent product performance, and the effect of improving the quality of membrane materials

Inactive Publication Date: 2016-04-13
福州赛瑞特新材料技术开发有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the uneven corrosion of the evaporation boat, and because the evaporated aluminum liquid also participates in conduction and heat generation, it is easy to cause the aluminum liquid to splash, burn through the substrate, and form pinholes in the middle and late stages of the evaporation boat life.

Method used

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  • Combined type graphite electrode-ceramic evaporator boat
  • Combined type graphite electrode-ceramic evaporator boat
  • Combined type graphite electrode-ceramic evaporator boat

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Such as figure 1 , 2 As shown, a combined graphite electrode-ceramic evaporation boat includes a ceramic boat 1 and a graphite electrode heating element 2, and the ceramic boat 1 is made of hot-pressed boron nitride ceramics or hot-pressed boron nitride-based composite ceramics. The boat body of the evaporation tank 5 and the rectangular hole 6; the graphite electrode heating element 2 is prepared from high-purity fine-grained graphite; In the square hole, a combined evaporation boat is formed, and the clearance fit is H8 / f7 or H7 / js6.

Embodiment 2

[0028] Such as image 3 , 4 As shown, a combined graphite electrode-ceramic evaporation boat includes a ceramic boat 1 and a graphite electrode heating element 2, and the ceramic boat 1 is made of hot-pressed boron nitride ceramics or hot-pressed boron nitride-based composite ceramics. The boat body of the evaporation tank 5 and the T-shaped groove 4 (the cross section of the channel is T-shaped); the graphite electrode heating element 2 is prepared from high-purity fine-grained graphite; the graphite electrode heating element 2 is made according to a certain The gap fit is installed in the T-shaped groove of the ceramic boat 1 to form a combined evaporation boat, and the gap fit is H7 / k6 or H7 / js6. The T-shaped groove 4 is actually a groove located on the lower surface of the ceramic boat 1, which can be wider when the graphite electrode heating element 2 is loaded, and the T-shaped groove can be stuck into the graphite electrode heating element 2 after loading.

Embodiment 3

[0030] Such as Figure 5 , 6 , 7, a combined graphite electrode-ceramic evaporation boat, including ceramic boat 1, graphite electrode heating element 2 and ceramic insulation board 3, said ceramic boat 1 is made of hot-pressed boron nitride ceramics or hot-pressed nitride Boron-based composite ceramics are prepared into a boat body with evaporation tank 5 and T-shaped groove 4; the graphite electrode heating element 2 is prepared from high-purity fine-grained graphite; the ceramic insulation board 3 is made of hot-pressed boron nitride Ceramics or hot-pressed boron nitride-based composite ceramics are prepared into thin plates with mounting edges; the graphite electrode heating element 2 and the ceramic insulation plate 3 are stacked from top to bottom, and are fitted into the ceramic boat 1 according to a certain precision gap. In the T-shaped groove, a combined evaporation boat is formed, and the clearance fit is H7 / k6 or H7 / js6. The T-shaped groove 4 is actually located o...

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Abstract

The invention relates to a combined type graphite electrode-ceramic evaporator boat. According to the specific technical scheme, a boat body provided with an evaporation groove and a rectangular hole or T-shaped groove is prepared by means of hot-press boron nitride ceramics or hot-press boron nitride-base composite ceramics (such as boron nitride / aluminum nitride composite ceramics); a graphite electrode heating body is prepared by means of high-purity fine-grained graphite; 3, a sheet provided with installation edges is prepared by means of hot-press boron nitride ceramics or hot-press boron nitride-base composite ceramics to serve as a ceramic insulation board. A graphite electrode is placed in the rectangular hole or T-shaped groove of the ceramic boat body or the graphite electrode and the ceramic insulation board are put in the rectangular hole or T-shaped groove of the ceramic boat body together in a stacked mode with one above the other to form the evaporation boat. The evaporation boat has the advantages that performance is excellent, service life is longer and the manufacturing technology is simple. Evaporated molten aluminum can be insulated from a heating element, splashing of the molten aluminum is reduced greatly, the quality of a membrane material is improved, and economical benefits and social benefits are remarkable.

Description

Technical field: [0001] The invention relates to a manufacturing method of an evaporating element for vacuum evaporating aluminized thin films, in particular to a combined graphite electrode-ceramic evaporating boat. Background technique: [0002] Vacuum evaporation aluminum plating technology is the method with the lowest comprehensive cost for large-scale production of metal aluminum thin films. It is widely used in a variety of industries and daily necessities, such as large-capacity film capacitors, various fresh-keeping aluminum-plastic packaging materials, electronic evacuation films in cathode ray tube displays, and so on. [0003] The most critical consumable components in the vacuum evaporation aluminum plating process are the heating elements, evaporation boats or evaporation crucibles that turn the metal aluminum wire into aluminum vapor. Due to the high activity of metal aluminum, the material used as evaporation boat or evaporation crucible must be able to wi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/26C23C14/14
CPCC23C14/26C23C14/14C23C14/243
Inventor 黄向东姜明
Owner 福州赛瑞特新材料技术开发有限公司