Vacuum chuck for KDP crystalline material

Abstract

The invention relates to a vacuum chuck for a KDP crystalline material. A special vacuum chuck high-strength fixed support is mounted on a high-flatness workbench and a liquid hydrostatic guideway support plate assembly through a special vacuum chuck high-strength fixed support fixing nut and bolt assembly; vacuum chuck balance adjusters are distributed at four corners of a vacuum chuck balance adjusting plate, grooves shaped like dual nested rectangles have consistent width and depth, each groove is communicated through a vent hole connected with a special vacuum chuck air-guide pipe, and the special vacuum chuck air-guide pipe is connected with an air pump and a vacuum generator assembly. When the air pump and the vacuum generator assembly operate, the grooves shaped like dual nested rectangles in the surface of the vacuum chuck are in a vacuum state, so that the vacuum chuck has suction to fix KDP crystalline parts. The vacuum chuck is also applicable to all parts with non-machining surfaces being planes, and the clamping accuracy is guaranteed; non-uniform force clamping deformation does not exist, so that the machining residual stress of the parts is greatly reduced.

Description

technical field [0001] The invention relates to a fixing device for KDP crystal material, which can realize ultra-precision processing of KDP crystal material with high precision, high efficiency and low cost. Background technique [0002] KDP crystal is a kind of inorganic electro-optic nonlinear optical crystal with excellent performance. It is the only crystal material that can grow in large size at present, and has large nonlinear optical coefficient, high laser damage threshold, wide transmission wavelength range, and optical uniformity. It has the advantages of good performance and easy phase matching. Therefore, KDP crystals are widely used in laser frequency doubling conversion, photoelectric modulation, fast photoelectric switching and other high-tech fields of laser and nonlinear optics, and have an important position in inertial confinement fusion systems that cannot be replaced by other crystal materials. However, the KDP crystal itself has a series of character...

AI Technical Summary

Problems solved by technology

[0004] In order to improve the low-precision, low-efficiency, and high-cost processing status of the existing KDP crystal material diamond single-point flying knife cutting process, the present invention provides a KDP crystal material vacuum suction cup, which is installed on the support seat and Used in conjunction with the horizontal machine tool structure, it can realize the increase or decrease of the number of teeth of the diamond tool, the adjustment of the working radius of the tool and the cutting angle of the tool according to the actual processing needs, and the device is equipped with a special fixture, which can truly realize the high precision and high precision of the KDP crystal material. Efficiency, low cost precision machining

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