Micro gas chromatographic column chip and preparation method thereof

A micro gas chromatography and chip technology, applied in the field of microelectronics and chromatographic analysis, can solve the problems of limited area of ​​stationary phase, limited length of chromatographic column, insufficient separation of mixture, etc., and achieve the effect of increasing the surface area and reducing the size

Inactive Publication Date: 2016-04-20
ZHEJIANG UNIV
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  • Abstract
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  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the existing miniature gas chromatographic column chips are limited in size due to the limited length of the chromatographic column. Therefore, the area of ​​the stationary phase in the channel is limited, which leads to uneven contact between the stationary phase and the mixture during the separation process. The separa

Method used

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  • Micro gas chromatographic column chip and preparation method thereof
  • Micro gas chromatographic column chip and preparation method thereof
  • Micro gas chromatographic column chip and preparation method thereof

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Embodiment Construction

[0023] The present invention will be further described below in conjunction with the accompanying drawings.

[0024] Such as figure 1 , 2 As shown, the micro-gas chromatographic column chip of the present invention includes a silicon substrate 1, has parallel channels 4 connected in sequence on the silicon substrate, and has silicon-based cylinders 3 regularly arranged in the channels, and the regular arrangement of the cylinders can make The increase of air pressure in the channel is conducive to increasing the gas flow rate and increasing the separation speed; the height of the cylinder is consistent with the depth of the channel, and an air inlet 7 and an air outlet 8 are opened on the silicon substrate, and the air inlet is located at one end of the channel. It is connected with the sampling system; the gas outlet is located at the other end of the channel and connected with the detector. Both the air inlet and the air outlet are designed as a groove that expands outward...

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Abstract

The invention discloses a micro gas chromatographic column chip. The chip comprises a silicon substrate, wherein parallel channels which are sequentially communicated are formed in the silicon substrate, regularly arranged silicon substrate cylinders are arranged in the channels, the height of the cylinders is consistent with the depth of the channels, a gas inlet and a gas outlet are also formed in the silicon substrate, a sealing layer is arranged on the silicon substrate and sealed with the silicon substrate through a sealant, so that the gas inlet, the channels and the gas outlet form a closed gas flow path, and a double-layer stationary phase structure is arranged on the channels and cylinder surfaces in the gas flow path. According to the chip, the contact area of stationary phases can be increased by the aid of cylinder structures, meanwhile, the double-layer stationary phase structure is adopted, the separating capacity of the chromatographic column chip can be enhanced, and the separation variety of the chip for samples can be increased.

Description

technical field [0001] The invention belongs to the field of microelectronic technology and chromatographic analysis technology, and relates to a gas chromatographic chip and a preparation method thereof, in particular to a micro gas chromatographic column chip and a preparation method thereof. The chip is suitable for the separation of mixed gases and can be applied to food Safety, drug detection, field environmental survey, etc. Background technique [0002] Chromatography is a method of separation and analysis, which is widely used in analytical chemistry, organic chemistry, biochemistry and other fields. Chromatography uses the selective distribution of different substances in different phase states to elute with a mixture of mobile and stationary phases. Different substances in the mixture will move along the stationary phase at different speeds, and finally achieve the separation effect. Due to its large size, traditional gas chromatography is not conducive to portabi...

Claims

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Application Information

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IPC IPC(8): G01N30/60B81C1/00B81B1/00
CPCG01N30/606B81B1/002B81C1/00087G01N30/6095G01N2030/025
Inventor 汪小知王涛张润州
Owner ZHEJIANG UNIV
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