Method for making controllable curved holes through femtosecond lasers with assistance of electric field

A femtosecond laser and electric field-assisted technology, which is applied in laser welding equipment, manufacturing tools, welding equipment, etc., can solve the problem of chaotic bending holes, and achieve the effect of low price, stable properties and good consistency

Inactive Publication Date: 2016-05-04
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0003] Femtosecond laser drilling is mainly used to process straight holes with a large depth-to-diameter ratio, and can also process curved holes, but the processed curved holes are messy

Method used

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  • Method for making controllable curved holes through femtosecond lasers with assistance of electric field

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Embodiment

[0027] Embodiment: A femtosecond laser is used to prepare a curved hole array on an alumina material with a thickness of 100 um.

[0028] 1. Pretreat the selected alumina material, and ultrasonically clean it in acetone, absolute ethanol, and deionized water for 5 minutes respectively.

[0029] Two, as attached figure 1 As shown, the cleaned alumina material 3 is placed on a six-degree-of-freedom translation stage, the femtosecond laser 1 with a center wavelength of 800 nm, a pulse width of 50 fs, and a repetition rate greater than 100 Hz passes through a 5X objective lens 2 with a focal length of 200 mm and a vertical Focus on the surface of the material at an angle of α in the straight direction, control the voltage of the high-voltage DC voltage source 5, that is, control the voltage at both ends of the electrode plate 4, and process an array of curved holes 6 on the surface of the material, and control the single pulse energy of the femtosecond laser 1 to 300uJ , the numb...

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Abstract

The invention provides a method for making controllable curved holes through femtosecond lasers with the assistance of an electric field. Devices needed in the method comprise a femtosecond laser generator, the electric field with adjustable intensity and a six-dimensional mobile platform. The method comprises the steps that an aluminum oxide material is ultrasonically cleaned in acetone, absolute ethyl alcohol and deionized water for 5 min separately; the treated aluminum oxide material is fixed on the six-dimensional mobile platform, the femtosecond lasers generated by the femtosecond laser generator are gathered on the aluminum oxide material through a 5X objective lens, and the light path formed by the femtosecond lasers and the platform form an alpha angle; parameters such as energy, repetition frequency and the number of pulses of the femtosecond lasers are adjusted to control the depth-diameter ratio of micro holes, and meanwhile the intensity of the electric field is adjusted to control the curved directions and radians of the micro holes; the machined aluminum oxide material is taken down from the six-dimensional mobile platform and ultrasonically cleaned in acetone, absolute ethyl alcohol and deionized water for 5 min separately. By means of the method for making the controllable curved holes through the femtosecond lasers with the assistance of the electric field, control over the curved hole directions and the radians of the curved holes can be achieved.

Description

technical field [0001] The invention belongs to the field of functional materials, and in particular relates to a method for preparing controllable bending holes with a femtosecond laser assisted by an electric field. Background technique [0002] Femtosecond laser has ultra-fast and super-powerful characteristics, and its processing is a nonlinear / non-equilibrium complex process affected by many factors, with a unique processing mechanism. Due to its super-powerful properties, femtosecond laser can process almost all materials [Nature Photonics, 2(4): 219-225(2008)]. The microholes processed by femtosecond laser have the characteristics of high precision, almost no recasting, and large depth-to-diameter ratio. They have attracted much attention and are widely used in the field of precision machining. At present, femtosecond laser drilling has become a popular microhole processing method. [0003] Femtosecond laser drilling is mainly used to process straight holes with a l...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/382B23K26/70
CPCB23K2103/10
Inventor 曹强姜澜路彦辉
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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