Coating removing method for diamond coated tool
A diamond coating and cutting tool technology, applied in metal material coating process, coating, gaseous chemical plating, etc., to achieve high production efficiency and excellent decoating quality
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[0018] This embodiment takes the diamond-coated finishing end mill after wear as an example, and is applicable to all diamond-coated tools. The decoating process is carried out in plasma-enhanced chemical vapor deposition equipment. The specific decoating process is as follows:
[0019] (1) Fix the worn diamond-coated tool 2 on the sample stage of the vacuum chamber of the plasma-enhanced chemical vapor deposition equipment.
[0020] (2) Evacuate the vacuum chamber 1 of the plasma-enhanced chemical vapor deposition equipment to below 1-5×10-3Pa. The equipment adopts the plasma beam generated by 36Hz microwave, heats it to between 350-420°C, opens the gas inlet 4, and Oxygen, Cl 2 , ClO 2 The mixed gas with HCl is input into the vacuum chamber, the input speed of the gas is more than 0.6 liters / minute, the processing time is 10-15 min, and the working pressure is not lower than 100Pa when the gas is injected for processing. Simultaneously activate the plasma-enhanced plasma ...
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