Planar waveguide type near-and-mid infrared light modulator based on graphene-chalcogenide glass
A technology of chalcogenide glass and planar waveguide, applied in the direction of optical waveguide light guide, light guide, optics, etc., can solve the problems of difficult modulation and demodulation of integrated photonic devices, research lag, etc., and achieve small size, high modulation rate, and high extinction ratio Effect
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Embodiment 1
[0038] Schematic diagram of the three-dimensional structure of the near-mid-infrared optical modulator based on graphene-chalcogenide glass planar waveguide. figure 1 As shown: using 1.55-3 μm near-mid-infrared light wavelength, including a base layer 1, a ridge-shaped optical waveguide layer 2 disposed on the base layer 1, a first pillar 31 and a second pillar 32, and the first pillar 31 and the second pillar 32 are arranged on the left and right sides of the ridge-shaped optical waveguide layer 2, and the ridge-shaped optical waveguide layer 2 is divided into a first ridge-shaped optical waveguide layer 21 and a second ridge-shaped optical waveguide layer arranged on the first ridge-shaped optical waveguide layer 21 The waveguide layer 22, the first graphene layer 41 and the second graphene layer 42 are sequentially arranged between the first ridge optical waveguide layer 21 and the second ridge optical waveguide layer 22 from bottom to top; the first graphene The layer 41 e...
Embodiment 2
[0040] Schematic diagram of the three-dimensional structure of the near-mid-infrared optical modulator based on graphene-chalcogenide glass planar waveguide. figure 2 As shown: using 1.55-3 μm near-mid-infrared light wavelength, including a base layer 1, a ridge-shaped optical waveguide layer 2 disposed on the base layer 1, a first pillar 31 and a second pillar 32, and the first pillar 31 and the second pillar 32 are arranged on the left and right sides of the ridge-shaped optical waveguide layer 2, and the first graphene layer 41 and the second graphene layer 42 are sequentially arranged on the upper surface of the ridge-shaped optical waveguide layer 2 from bottom to top; the first graphene layer The layer 41 extends to the upper surface of the first pillar 31, and the second graphene layer 42 extends to the upper surface of the second pillar 32. The ridge-shaped optical waveguide layer 2 and the first graphene layer 41, the first graphene layer 41 A first isolation dielect...
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