Optical alignment compensation device, contact degree detecting device, evaporation system and method

A compensation device and detection device technology, applied in the direction of using optical devices, measuring devices, vacuum evaporation coating, etc., can solve the problems of increasing production costs and the like

Active Publication Date: 2016-06-22
EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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  • Abstract
  • Description
  • Claims
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  • Optical alignment compensation device, contact degree detecting device, evaporation system and method
  • Optical alignment compensation device, contact degree detecting device, evaporation system and method
  • Optical alignment compensation device, contact degree detecting device, evaporation system and method

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Embodiment Construction

[0092] Such as figure 1 As shown, the optical alignment compensation data acquisition device of the present invention is used for alignment compensation of the substrate 10 and the metal mask 11, including:

[0093] An image acquisition mechanism 12, used to acquire images of the opening 111 of the metal mask 11 and the corresponding pixel opening 101 of the substrate 10 after the substrate 10 and the metal mask 11 overlap;

[0094] A processing mechanism (not shown in the figure), used to obtain the opening 111 of the metal mask and the pixel opening 101 of the substrate according to the collected images of the opening 111 of the metal mask and the pixel opening 101 of the substrate 101 to calculate a position compensation data between the substrate 10 and the metal mask 11 .

[0095] In this embodiment, the image acquisition mechanism 12 is composed of a group of CCD arrays, and the image of the opening 111 of the metal mask and the image of the pixel opening 101 of the sub...

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Abstract

The invention discloses an optical alignment compensation device, a contact degree detecting device, an evaporation system and an evaporation method. An optical alignment compensation data acquisition device comprises an image acquisition mechanism and a processing mechanism, wherein the image acquisition mechanism is used for acquiring images of openings of a metal mask and pixel opening of a substrate corresponding to the metal mask when the substrate is overlapped with the metal mask; and the processing mechanism is used for acquiring an offset between the openings of the metal mask and the pixel opening of the substrate according to the acquired images of the openings of the metal mask and the pixel opening of the substrate, and calculating a position compensation data between the substrate and the metal mask. According to the optical alignment compensation device, the contact degree detecting device, the evaporation system and the evaporation method, images of the pixel opening of the substrate and the openings of the metal mask can be acquired before evaporation, alignment compensation and contact degree detection on the metal mask and the substrate can be carried out, organic materials do not need to be evaporated, and a substrate can be reused, thereby reducing the production cost, and increasing evaporation precision.

Description

technical field [0001] The invention relates to an optical alignment compensation device, a fitting degree detection device, an evaporation system and a method thereof, in particular to an optical alignment compensation device, an adhesion degree detection device, and an evaporation system for OLED evaporation technology and its methods. Background technique [0002] An OLED display device is a current-mode semiconductor light-emitting device based on organic materials. Its typical structure is to fabricate a multi-layer organic luminescent material on a glass substrate with a display circuit pattern, which includes a luminescent layer, and a layer of metal electrodes with low work function on the organic luminescent material. When a voltage is applied to the electrodes, the light-emitting layer produces light radiation. The light-emitting mechanism and process of OLED is to inject electrons and holes from the cathode and anode respectively, and the injected electrons and ...

Claims

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Application Information

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IPC IPC(8): H01L51/56C23C14/04C23C14/24G01B11/02
Inventor 林信志
Owner EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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