Microwave attenuator
A microwave attenuation and metal wire technology, which is applied to waveguide-type devices, circuits, electrical components, etc., can solve the problems that attenuators cannot take into account, it is difficult to achieve continuous changes in attenuation, and the structure is complex. integrated effects
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[0015] Embodiment 1: A graphene coplanar waveguide fixed attenuator. Such as figure 1 As shown, it includes a silicon substrate 1 , a silicon dioxide dielectric layer 2 , a copper or aluminum wire 3 , a copper or aluminum ground wire 4 and a graphene film resistor 5 .
[0016] During production, the silicon wafer is first oxidized, and silicon dioxide with a thickness of about 20 μm is formed on the surface of the silicon wafer as a dielectric layer; secondly, a single-layer graphene is prepared and etched on the dielectric layer, and the shape is about 360 μm in width and 300 μm in length Afterwards, prepare the wire and the ground wire, the wire width is 190 μm, leave a 20 μm long gap in the middle, the center of the gap coincides with the center of the graphene film resistor, the ground wire is 250 μm wide, and 20 μm away from the wire.
[0017] The specific process for preparing single-layer graphene can be grown by chemical vapor deposition (CVD) or mechanically exfoliat...
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