A decompression heating drying device

Abstract

The invention discloses a pressure-reducing heating and drying device. The pressure-reducing heating and drying device comprises a cavity, a bearing mechanism, a heating mechanism, a pressure reducing mechanism and an air pressure adjusting mechanism; the bearing mechanism and the heating mechanism are arranged in the cavity; the pressure reducing mechanism and the air pressure adjusting mechanism communicate with the cavity; the cavity is used for covering the periphery of a substrate; the bearing mechanism is used for bearing the substrate in the state that the main face of the substrate faces upwards; the heating mechanism is used for heating the substrate; the pressure reducing mechanism is used for reducing pressure in the cavity when the heating mechanism heats the substrate; and the air pressure adjusting mechanism is used for adjusting the intensity of the pressure in the cavity when the intensity of the pressure in the cavity and the temperature of the substrate meet preset requirements, and therefore the intensity of pressure inside and outside the cavity can be balanced. In this way, the pressure-reducing heating and drying device can effectively accelerate the drying process, shortens the production process and saves the production cost.

Description

technical field [0001] The invention relates to the field display field, in particular to a decompression heating and drying device. Background technique [0002] The current manufacturing process of color filter (Color filter, CF) generally includes: sputtering, coating, drying, exposure, and development. Specifically, first sputtering an indium tin oxide (ITO) film on the back of the white substrate, then coating a thin film with photoresist on the front of the substrate, and then drying the coated substrate under reduced pressure and heating. The solvent in the film is volatilized, and then the coated substrate is subjected to alignment exposure after cooling, and the unexposed area is washed off under the action of the developing solution to leave the exposed area. [0003] Wherein, the coated wet film is dried under low pressure by a vacuum drying device to remove part of the photoresist solvent in the wet film, and then heated and dried by a heating and drying device ...

AI Technical Summary

Problems solved by technology

In addition, since the decompression drying device and the heating and drying device are separated, the substrate needs to be transported to the heating and drying device after the decompression drying treatment, and it is difficult to quickly perform the decompression drying treatment and the heating and drying treatment.

[0005] Since the drying process needs to be processed by a split decompression drying device and a heating and drying device, the drying process is cumbersome and time-consuming, and the production cost is high

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