Infrared optical thin film protective film and preparation method thereof

Abstract

The invention relates to a thin film preparation technology, in particular to an infrared optical thin film protective film and a preparation method thereof. The infrared optical thin film protective film is characterized in that the protective film is plated on the outer layer of an infrared optical thin film and is organic silicide containing one non-hydrolysis group and one hydrolyzable group at a minimum; in film-plated equipment, the multilayer infrared optical thin film is prepared on a substrate through an electronic gun or an evaporation blocking method, in the same film-plated equipment, the protective film is prepared on the outer layer of the multilayer infrared optical thin film through the evaporation blocking method. The infrared optical thin film protective film and the preparation method thereof have the advantages that the infrared optical thin film can be effectively protected, hardness is high, friction resistance is good, and meanwhile characteristics of the infrared optical thin film are changed slightly; the preparation method is compatible with a preparation method of a conventional infrared optical thin film, the process matching property is good, the film plating temperature is low, and cost is correspondingly lowered.

Description

Technical field [0001] The invention relates to film preparation technology, in particular to an infrared optical film protective film and a preparation method thereof. Background technique [0002] Infrared optical films are widely used in infrared imaging and infrared sensing. In general, the coating thickness of infrared optical films is larger than that of optical films in the visible light band, usually about 10 microns. In addition, some infrared optical coating materials (such as ZnS) generally have lower mechanical strength than visible light coating materials. In this way, the infrared film is more prone to scratches and other damage, which reduces the stability and life of the entire infrared optical system. [0003] To this end, people have developed a variety of infrared optical film protective films, such as diamond and diamond-like carbon, germanium carbide, boron phosphide, and nitrides containing transition metals Zr and Hf. The above infrared protective films ar...

AI Technical Summary

Problems solved by technology

However, at present, the conventional infrared film mostly adopts the evaporation method, which makes the same infrared film need to be carried out in two kinds of coating equipment, which increases the operating cost

At the same time, inorganic infrared protective films such as diamond, diamond-like carbon, and germanium carbide have relatively large stresses, which are prone to film cracking or film removal, which increases the difficulty of preparation.

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