Automated processing method for single interference round fringe pre-processing
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- HARBIN UNIV OF SCI & TECH
- Publication Date
- 2016-08-10
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to the technical field of optical interference precision detection, in particular to an automatic image preprocessing method for interferometric measurement based on a single interference circular fringe. Background technique
[0002] Optical interference detection technology is widely used in optical surface detection, vibration analysis, spatial interference detection in astronomical optics, thin film thickness and refractive index measurement, etc. The most important part of all optical interferometry is the analysis of fringe data. Currently, fringe analysis techniques mainly include three categories: intensity-based analysis, transformation-based analysis, and phase-based analysis. The transform-based analysis technique transforms the interferogram into other domains for analysis through Fourier transform or wavelet transform. The intensity-based analysis technology directly processes the grayscale image, which has a fast p...